JPS53113295A - Oxygen recycle ozone generator - Google Patents

Oxygen recycle ozone generator

Info

Publication number
JPS53113295A
JPS53113295A JP2905777A JP2905777A JPS53113295A JP S53113295 A JPS53113295 A JP S53113295A JP 2905777 A JP2905777 A JP 2905777A JP 2905777 A JP2905777 A JP 2905777A JP S53113295 A JPS53113295 A JP S53113295A
Authority
JP
Japan
Prior art keywords
ozone
ozone generator
adsorption
oxygen recycle
nox
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2905777A
Other languages
Japanese (ja)
Other versions
JPS5910925B2 (en
Inventor
Shigenori Yagi
Shuji Ogawa
Takanori Nanba
Norikazu Tabata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2905777A priority Critical patent/JPS5910925B2/en
Publication of JPS53113295A publication Critical patent/JPS53113295A/en
Publication of JPS5910925B2 publication Critical patent/JPS5910925B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

PURPOSE: To accomplish prolonged continuous supply of O3 by means of NOx removal equipment installed between ozone adsorption towers and an ozone generator to prevent adsorption of NOx by the ozone adsorption towers, NOx removal maintain constant adsorption of ozone, and restrain change in the concentration of removable ozone.
COPYRIGHT: (C)1978,JPO&Japio
JP2905777A 1977-03-15 1977-03-15 Oxygen recycling ozone generator Expired JPS5910925B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2905777A JPS5910925B2 (en) 1977-03-15 1977-03-15 Oxygen recycling ozone generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2905777A JPS5910925B2 (en) 1977-03-15 1977-03-15 Oxygen recycling ozone generator

Publications (2)

Publication Number Publication Date
JPS53113295A true JPS53113295A (en) 1978-10-03
JPS5910925B2 JPS5910925B2 (en) 1984-03-12

Family

ID=12265728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2905777A Expired JPS5910925B2 (en) 1977-03-15 1977-03-15 Oxygen recycling ozone generator

Country Status (1)

Country Link
JP (1) JPS5910925B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5795808A (en) * 1980-12-02 1982-06-14 Mitsubishi Electric Corp Generating apparatus for ozone
JP2008297130A (en) * 2007-05-29 2008-12-11 Iwatani Internatl Corp Ozone gas concentration method
JP2011121805A (en) * 2009-12-09 2011-06-23 Iwatani Internatl Corp Method for removing nitrogen oxide and moisture contained in ozone gas
JP2013180931A (en) * 2012-03-02 2013-09-12 Iwatani Internatl Corp Method for pretreating adsorbent for removing nitrogen oxide contained in ozone gas, adsorbent for removing nitrogen oxide and pretreatment apparatus
JP2014065620A (en) * 2012-09-25 2014-04-17 Mitsubishi Electric Corp Ozone feeding system and effluent treatment system
JP2015010016A (en) * 2013-06-28 2015-01-19 岩谷産業株式会社 Method for removing nitrogen oxide contained in ozone gas
JP2016123915A (en) * 2014-12-26 2016-07-11 岩谷産業株式会社 Removal method of nitrogen oxide, supply method of ozone gas, and ozone gas supply device
US10597296B2 (en) 2015-09-18 2020-03-24 Iwatani Corporation Method for supplying ozone gas and system for supplying ozone gas

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4361056B2 (en) * 2003-12-17 2009-11-11 東京エレクトロン株式会社 Ozone treatment method and ozone treatment apparatus

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5795808A (en) * 1980-12-02 1982-06-14 Mitsubishi Electric Corp Generating apparatus for ozone
JP2008297130A (en) * 2007-05-29 2008-12-11 Iwatani Internatl Corp Ozone gas concentration method
JP2011121805A (en) * 2009-12-09 2011-06-23 Iwatani Internatl Corp Method for removing nitrogen oxide and moisture contained in ozone gas
JP2013180931A (en) * 2012-03-02 2013-09-12 Iwatani Internatl Corp Method for pretreating adsorbent for removing nitrogen oxide contained in ozone gas, adsorbent for removing nitrogen oxide and pretreatment apparatus
JP2014065620A (en) * 2012-09-25 2014-04-17 Mitsubishi Electric Corp Ozone feeding system and effluent treatment system
JP2015010016A (en) * 2013-06-28 2015-01-19 岩谷産業株式会社 Method for removing nitrogen oxide contained in ozone gas
JP2016123915A (en) * 2014-12-26 2016-07-11 岩谷産業株式会社 Removal method of nitrogen oxide, supply method of ozone gas, and ozone gas supply device
US10597296B2 (en) 2015-09-18 2020-03-24 Iwatani Corporation Method for supplying ozone gas and system for supplying ozone gas

Also Published As

Publication number Publication date
JPS5910925B2 (en) 1984-03-12

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