JPS53128585A - Vapor depositing device - Google Patents

Vapor depositing device

Info

Publication number
JPS53128585A
JPS53128585A JP4261877A JP4261877A JPS53128585A JP S53128585 A JPS53128585 A JP S53128585A JP 4261877 A JP4261877 A JP 4261877A JP 4261877 A JP4261877 A JP 4261877A JP S53128585 A JPS53128585 A JP S53128585A
Authority
JP
Japan
Prior art keywords
fixed
depositing device
vapor depositing
substrate
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4261877A
Other languages
Japanese (ja)
Inventor
Noburo Yasuda
Nagaji Ogawa
Masayuki Asaka
Takashi Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4261877A priority Critical patent/JPS53128585A/en
Publication of JPS53128585A publication Critical patent/JPS53128585A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE:To provide the subject device wherein one end of a boat made of a high melting point metal is fixed to an electrode bar and another end thereof is fixed to an electroconductive rod movable in the horizontal direction, and a substrate heating device capable of heating the substrate be vapor deposited at a temperature above the predetermined temperature is provided; which is adapted for mass production and capable of curtailing time.
JP4261877A 1977-04-15 1977-04-15 Vapor depositing device Pending JPS53128585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4261877A JPS53128585A (en) 1977-04-15 1977-04-15 Vapor depositing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4261877A JPS53128585A (en) 1977-04-15 1977-04-15 Vapor depositing device

Publications (1)

Publication Number Publication Date
JPS53128585A true JPS53128585A (en) 1978-11-09

Family

ID=12640999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4261877A Pending JPS53128585A (en) 1977-04-15 1977-04-15 Vapor depositing device

Country Status (1)

Country Link
JP (1) JPS53128585A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5591973A (en) * 1979-01-05 1980-07-11 Ricoh Co Ltd Supporting method for boat in vacuum deposition device
JPH03189431A (en) * 1989-12-20 1991-08-19 Akebono Brake Res & Dev Center Ltd Squeak prevention device for disc brake
US5168543A (en) * 1991-04-05 1992-12-01 The Boeing Company Direct contact heater for vacuum evaporation utilizing thermal expansion compensation means
CN110872689A (en) * 2018-08-30 2020-03-10 北京铂阳顶荣光伏科技有限公司 Evaporation boat disassembly tools and evaporation equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5591973A (en) * 1979-01-05 1980-07-11 Ricoh Co Ltd Supporting method for boat in vacuum deposition device
JPH03189431A (en) * 1989-12-20 1991-08-19 Akebono Brake Res & Dev Center Ltd Squeak prevention device for disc brake
US5168543A (en) * 1991-04-05 1992-12-01 The Boeing Company Direct contact heater for vacuum evaporation utilizing thermal expansion compensation means
CN110872689A (en) * 2018-08-30 2020-03-10 北京铂阳顶荣光伏科技有限公司 Evaporation boat disassembly tools and evaporation equipment
CN110872689B (en) * 2018-08-30 2024-05-28 上海祖强能源有限公司 Evaporation boat disassembly and assembly tools and evaporation equipment

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