JPS5314577A - Ion plating device - Google Patents

Ion plating device

Info

Publication number
JPS5314577A
JPS5314577A JP8891976A JP8891976A JPS5314577A JP S5314577 A JPS5314577 A JP S5314577A JP 8891976 A JP8891976 A JP 8891976A JP 8891976 A JP8891976 A JP 8891976A JP S5314577 A JPS5314577 A JP S5314577A
Authority
JP
Japan
Prior art keywords
ion plating
plating device
ion
plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8891976A
Other languages
Japanese (ja)
Inventor
Youichi Murayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP8891976A priority Critical patent/JPS5314577A/en
Publication of JPS5314577A publication Critical patent/JPS5314577A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP8891976A 1976-07-26 1976-07-26 Ion plating device Pending JPS5314577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8891976A JPS5314577A (en) 1976-07-26 1976-07-26 Ion plating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8891976A JPS5314577A (en) 1976-07-26 1976-07-26 Ion plating device

Publications (1)

Publication Number Publication Date
JPS5314577A true JPS5314577A (en) 1978-02-09

Family

ID=13956317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8891976A Pending JPS5314577A (en) 1976-07-26 1976-07-26 Ion plating device

Country Status (1)

Country Link
JP (1) JPS5314577A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5384885A (en) * 1976-12-31 1978-07-26 Youichi Murayama Surface treating apparatus
JPS58157138A (en) * 1982-03-15 1983-09-19 Ulvac Corp Device for forming film
JPS6294917A (en) * 1985-10-22 1987-05-01 Mitsubishi Electric Corp Apparatus for forming thin film

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49113733A (en) * 1973-03-05 1974-10-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49113733A (en) * 1973-03-05 1974-10-30

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5384885A (en) * 1976-12-31 1978-07-26 Youichi Murayama Surface treating apparatus
JPS58157138A (en) * 1982-03-15 1983-09-19 Ulvac Corp Device for forming film
JPS6294917A (en) * 1985-10-22 1987-05-01 Mitsubishi Electric Corp Apparatus for forming thin film

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