JPS53149794A - Piezo-electric vibrator - Google Patents

Piezo-electric vibrator

Info

Publication number
JPS53149794A
JPS53149794A JP6450677A JP6450677A JPS53149794A JP S53149794 A JPS53149794 A JP S53149794A JP 6450677 A JP6450677 A JP 6450677A JP 6450677 A JP6450677 A JP 6450677A JP S53149794 A JPS53149794 A JP S53149794A
Authority
JP
Japan
Prior art keywords
piezo
electric vibrator
container
getter
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6450677A
Other languages
Japanese (ja)
Inventor
Nobuyoshi Matsuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments and Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments and Electronics Ltd filed Critical Seiko Instruments and Electronics Ltd
Priority to JP6450677A priority Critical patent/JPS53149794A/en
Publication of JPS53149794A publication Critical patent/JPS53149794A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To improve the reliability and stability, by arranging a getter material inside the vacuum container of a miniature piezo-electric vibrator, by giving the getter effect at the time of the irradiation of a laser beam for frequency adjustment, by producing a clean vacuum inside the container.
JP6450677A 1977-06-01 1977-06-01 Piezo-electric vibrator Pending JPS53149794A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6450677A JPS53149794A (en) 1977-06-01 1977-06-01 Piezo-electric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6450677A JPS53149794A (en) 1977-06-01 1977-06-01 Piezo-electric vibrator

Publications (1)

Publication Number Publication Date
JPS53149794A true JPS53149794A (en) 1978-12-27

Family

ID=13260146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6450677A Pending JPS53149794A (en) 1977-06-01 1977-06-01 Piezo-electric vibrator

Country Status (1)

Country Link
JP (1) JPS53149794A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007251238A (en) * 2006-03-13 2007-09-27 Epson Toyocom Corp Piezoelectric device and method for manufacturing piezoelectric device
JP2007251239A (en) * 2006-03-13 2007-09-27 Epson Toyocom Corp Piezoelectric device and method for manufacturing piezoelectric device
WO2009101733A1 (en) * 2008-02-16 2009-08-20 Seiko Instruments Inc. Piezoelectric vibrator, manufacturing method of the piezoelectric vibrator, oscillator, electronic instrument and atomic clock
WO2010023732A1 (en) * 2008-08-27 2010-03-04 セイコーインスツル株式会社 Piezoelectric vibrator, method for manufacturing piezoelectric vibrator, oscillator, electronic device, and radio-controlled clock
US20110018398A1 (en) * 2009-07-24 2011-01-27 Fukuda Junya Piezoelectric vibrator, manufacturing method of piezoelectric vibrator, oscillator, electronic device, and radio-controlled clock
US20110018388A1 (en) * 2009-07-24 2011-01-27 Fukuda Junya Piezoelectric vibrator, manufacturing method of piezoelectric vibrator, oscillator, electronic device, and radio-controlled clock
JP2011030095A (en) * 2009-07-28 2011-02-10 Seiko Instruments Inc Piezoelectric vibrator, method for manufacturing piezoelectric vibrator, oscillator, electronic equipment, and radio wave clock
JP5128670B2 (en) * 2008-08-27 2013-01-23 セイコーインスツル株式会社 Piezoelectric vibrator, oscillator, electronic device, radio timepiece, and method for manufacturing piezoelectric vibrator
JP5128671B2 (en) * 2008-08-27 2013-01-23 セイコーインスツル株式会社 Piezoelectric vibrator, oscillator, electronic device, radio timepiece, and method for manufacturing piezoelectric vibrator

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007251239A (en) * 2006-03-13 2007-09-27 Epson Toyocom Corp Piezoelectric device and method for manufacturing piezoelectric device
JP2007251238A (en) * 2006-03-13 2007-09-27 Epson Toyocom Corp Piezoelectric device and method for manufacturing piezoelectric device
WO2009101733A1 (en) * 2008-02-16 2009-08-20 Seiko Instruments Inc. Piezoelectric vibrator, manufacturing method of the piezoelectric vibrator, oscillator, electronic instrument and atomic clock
TWI481190B (en) * 2008-02-16 2015-04-11 精工電子水晶科技股份有限公司 A piezoelectric vibrator, a method of manufacturing a piezoelectric vibrator, an oscillator, an electronic device, and a radio wave
JP5237976B2 (en) * 2008-02-16 2013-07-17 セイコーインスツル株式会社 Piezoelectric vibrator, method for manufacturing piezoelectric vibrator, oscillator, electronic device, and radio timepiece
US8179021B2 (en) 2008-02-16 2012-05-15 Seiko Instruments Inc. Piezoelectric resonator with control film to increase a degree of vacuum inside the package
JP5128671B2 (en) * 2008-08-27 2013-01-23 セイコーインスツル株式会社 Piezoelectric vibrator, oscillator, electronic device, radio timepiece, and method for manufacturing piezoelectric vibrator
WO2010023732A1 (en) * 2008-08-27 2010-03-04 セイコーインスツル株式会社 Piezoelectric vibrator, method for manufacturing piezoelectric vibrator, oscillator, electronic device, and radio-controlled clock
US8552805B2 (en) 2008-08-27 2013-10-08 Seiko Instruments Inc. Piezoelectric vibrator, method of manufacturing piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece
JP5226073B2 (en) * 2008-08-27 2013-07-03 セイコーインスツル株式会社 Piezoelectric vibrators, oscillators, electronic equipment and radio clocks
JP5128670B2 (en) * 2008-08-27 2013-01-23 セイコーインスツル株式会社 Piezoelectric vibrator, oscillator, electronic device, radio timepiece, and method for manufacturing piezoelectric vibrator
US8436515B2 (en) * 2009-07-24 2013-05-07 Seiko Instruments Inc. Piezoelectric vibrator having a piezoelectric vibrating strip and a bonding film with laser irradiation marks
JP2011029911A (en) * 2009-07-24 2011-02-10 Seiko Instruments Inc Method for manufacturing piezoelectric vibrator, piezoelectric vibrator, oscillator, electronic device, and radio wave clock
CN101964639A (en) * 2009-07-24 2011-02-02 精工电子有限公司 The manufacture method of voltage fluctuation device, piezoelectric vibrator, oscillator, electronic equipment and radio wave clock
US20110018388A1 (en) * 2009-07-24 2011-01-27 Fukuda Junya Piezoelectric vibrator, manufacturing method of piezoelectric vibrator, oscillator, electronic device, and radio-controlled clock
US20110018398A1 (en) * 2009-07-24 2011-01-27 Fukuda Junya Piezoelectric vibrator, manufacturing method of piezoelectric vibrator, oscillator, electronic device, and radio-controlled clock
JP2011030095A (en) * 2009-07-28 2011-02-10 Seiko Instruments Inc Piezoelectric vibrator, method for manufacturing piezoelectric vibrator, oscillator, electronic equipment, and radio wave clock

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