JPS5319763A - Mark detector in electron beam exposure - Google Patents

Mark detector in electron beam exposure

Info

Publication number
JPS5319763A
JPS5319763A JP9404676A JP9404676A JPS5319763A JP S5319763 A JPS5319763 A JP S5319763A JP 9404676 A JP9404676 A JP 9404676A JP 9404676 A JP9404676 A JP 9404676A JP S5319763 A JPS5319763 A JP S5319763A
Authority
JP
Japan
Prior art keywords
electron beam
beam exposure
mark detector
mark
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9404676A
Other languages
Japanese (ja)
Other versions
JPS5324789B2 (en
Inventor
Korehito Matsuda
Atsushi Iwata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP9404676A priority Critical patent/JPS5319763A/en
Publication of JPS5319763A publication Critical patent/JPS5319763A/en
Publication of JPS5324789B2 publication Critical patent/JPS5324789B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To permit positive detection of a mark by automatically setting a threshold value in response to the detected signal value.
COPYRIGHT: (C)1978,JPO&Japio
JP9404676A 1976-08-09 1976-08-09 Mark detector in electron beam exposure Granted JPS5319763A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9404676A JPS5319763A (en) 1976-08-09 1976-08-09 Mark detector in electron beam exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9404676A JPS5319763A (en) 1976-08-09 1976-08-09 Mark detector in electron beam exposure

Publications (2)

Publication Number Publication Date
JPS5319763A true JPS5319763A (en) 1978-02-23
JPS5324789B2 JPS5324789B2 (en) 1978-07-22

Family

ID=14099612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9404676A Granted JPS5319763A (en) 1976-08-09 1976-08-09 Mark detector in electron beam exposure

Country Status (1)

Country Link
JP (1) JPS5319763A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5585028A (en) * 1978-12-22 1980-06-26 Hitachi Ltd Mark detecting signal amplifier
JPS5793164U (en) * 1980-11-28 1982-06-08

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105382A (en) * 1974-01-28 1975-08-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105382A (en) * 1974-01-28 1975-08-20

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5585028A (en) * 1978-12-22 1980-06-26 Hitachi Ltd Mark detecting signal amplifier
JPS5793164U (en) * 1980-11-28 1982-06-08

Also Published As

Publication number Publication date
JPS5324789B2 (en) 1978-07-22

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