JPS5321901A - Formation of carbonized protective film for magnetic recording medium - Google Patents

Formation of carbonized protective film for magnetic recording medium

Info

Publication number
JPS5321901A
JPS5321901A JP9635876A JP9635876A JPS5321901A JP S5321901 A JPS5321901 A JP S5321901A JP 9635876 A JP9635876 A JP 9635876A JP 9635876 A JP9635876 A JP 9635876A JP S5321901 A JPS5321901 A JP S5321901A
Authority
JP
Japan
Prior art keywords
protective film
formation
recording medium
magnetic recording
carbonized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9635876A
Other languages
Japanese (ja)
Inventor
Takeo Hinobayashi
Masaki Shinohara
Kazuo Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9635876A priority Critical patent/JPS5321901A/en
Publication of JPS5321901A publication Critical patent/JPS5321901A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To improve abrasion rsistance of protective film of magnetic disc or magnetic drum as well as play-back performance thereof by effecting spattering by use of a carbonized metal as target in a specific argon atmosphere.
JP9635876A 1976-08-11 1976-08-11 Formation of carbonized protective film for magnetic recording medium Pending JPS5321901A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9635876A JPS5321901A (en) 1976-08-11 1976-08-11 Formation of carbonized protective film for magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9635876A JPS5321901A (en) 1976-08-11 1976-08-11 Formation of carbonized protective film for magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS5321901A true JPS5321901A (en) 1978-02-28

Family

ID=14162761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9635876A Pending JPS5321901A (en) 1976-08-11 1976-08-11 Formation of carbonized protective film for magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS5321901A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60155668A (en) * 1984-01-26 1985-08-15 Denki Kagaku Kogyo Kk Formation of protective hydrocarbon film on surface of magnetic storage medium
JPS61105720A (en) * 1984-10-26 1986-05-23 Denki Kagaku Kogyo Kk Magnetic storage medium
JPS62208586A (en) * 1986-03-08 1987-09-12 東京エレクトロン相模株式会社 Heater
US4777068A (en) * 1984-08-10 1988-10-11 Canon Kabushiki Kaisha Optical recording medium
US5073460A (en) * 1984-10-22 1991-12-17 Hitachi, Ltd. Magnetic recording medium and process for producing the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5083097U (en) * 1973-12-03 1975-07-16
JPS50141198A (en) * 1974-04-27 1975-11-13

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5083097U (en) * 1973-12-03 1975-07-16
JPS50141198A (en) * 1974-04-27 1975-11-13

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60155668A (en) * 1984-01-26 1985-08-15 Denki Kagaku Kogyo Kk Formation of protective hydrocarbon film on surface of magnetic storage medium
US4777068A (en) * 1984-08-10 1988-10-11 Canon Kabushiki Kaisha Optical recording medium
US5073460A (en) * 1984-10-22 1991-12-17 Hitachi, Ltd. Magnetic recording medium and process for producing the same
JPS61105720A (en) * 1984-10-26 1986-05-23 Denki Kagaku Kogyo Kk Magnetic storage medium
JPS62208586A (en) * 1986-03-08 1987-09-12 東京エレクトロン相模株式会社 Heater

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