JPS5328570A - Method of supplying ozoneecontaining gas - Google Patents

Method of supplying ozoneecontaining gas

Info

Publication number
JPS5328570A
JPS5328570A JP10349076A JP10349076A JPS5328570A JP S5328570 A JPS5328570 A JP S5328570A JP 10349076 A JP10349076 A JP 10349076A JP 10349076 A JP10349076 A JP 10349076A JP S5328570 A JPS5328570 A JP S5328570A
Authority
JP
Japan
Prior art keywords
ozoneecontaining
supplying
gas
supplying ozoneecontaining
ozoneecontaining gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10349076A
Other languages
English (en)
Inventor
Takamitsu Ishii
Ushio Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Oxygen Co Ltd
Original Assignee
Japan Oxygen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Oxygen Co Ltd filed Critical Japan Oxygen Co Ltd
Priority to JP10349076A priority Critical patent/JPS5328570A/ja
Publication of JPS5328570A publication Critical patent/JPS5328570A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP10349076A 1976-08-30 1976-08-30 Method of supplying ozoneecontaining gas Pending JPS5328570A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10349076A JPS5328570A (en) 1976-08-30 1976-08-30 Method of supplying ozoneecontaining gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10349076A JPS5328570A (en) 1976-08-30 1976-08-30 Method of supplying ozoneecontaining gas

Publications (1)

Publication Number Publication Date
JPS5328570A true JPS5328570A (en) 1978-03-16

Family

ID=14355433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10349076A Pending JPS5328570A (en) 1976-08-30 1976-08-30 Method of supplying ozoneecontaining gas

Country Status (1)

Country Link
JP (1) JPS5328570A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006273589A (ja) * 2005-03-28 2006-10-12 Iwatani Internatl Corp 低濃度オゾンガスの吸着方法及び吸着装置
JP2015171979A (ja) * 2014-03-12 2015-10-01 株式会社東芝 オゾン製造装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006273589A (ja) * 2005-03-28 2006-10-12 Iwatani Internatl Corp 低濃度オゾンガスの吸着方法及び吸着装置
JP2015171979A (ja) * 2014-03-12 2015-10-01 株式会社東芝 オゾン製造装置

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