JPS5329087A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5329087A
JPS5329087A JP10316076A JP10316076A JPS5329087A JP S5329087 A JPS5329087 A JP S5329087A JP 10316076 A JP10316076 A JP 10316076A JP 10316076 A JP10316076 A JP 10316076A JP S5329087 A JPS5329087 A JP S5329087A
Authority
JP
Japan
Prior art keywords
semiconductor device
wiring
burying
ics
stepping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10316076A
Other languages
Japanese (ja)
Inventor
Kazutaka Terajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10316076A priority Critical patent/JPS5329087A/en
Publication of JPS5329087A publication Critical patent/JPS5329087A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To facilitate the wiring formation of second and third layers and enhance the reliability of ICs by burying the wiring of a first layer within a semiconductor substrate thereby eliminating stepping.
COPYRIGHT: (C)1978,JPO&Japio
JP10316076A 1976-08-31 1976-08-31 Semiconductor device Pending JPS5329087A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10316076A JPS5329087A (en) 1976-08-31 1976-08-31 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10316076A JPS5329087A (en) 1976-08-31 1976-08-31 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5329087A true JPS5329087A (en) 1978-03-17

Family

ID=14346741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10316076A Pending JPS5329087A (en) 1976-08-31 1976-08-31 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5329087A (en)

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