JPS5329574A - Transmitting type photoelectric switch - Google Patents

Transmitting type photoelectric switch

Info

Publication number
JPS5329574A
JPS5329574A JP10310176A JP10310176A JPS5329574A JP S5329574 A JPS5329574 A JP S5329574A JP 10310176 A JP10310176 A JP 10310176A JP 10310176 A JP10310176 A JP 10310176A JP S5329574 A JPS5329574 A JP S5329574A
Authority
JP
Japan
Prior art keywords
photoelectric switch
type photoelectric
transmitting type
transmitting
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10310176A
Other languages
Japanese (ja)
Inventor
Hiromasa Sugano
Goutarou Kanechika
Akikazu Oosako
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP10310176A priority Critical patent/JPS5329574A/en
Publication of JPS5329574A publication Critical patent/JPS5329574A/en
Pending legal-status Critical Current

Links

Landscapes

  • Switches Operated By Changes In Physical Conditions (AREA)
JP10310176A 1976-08-31 1976-08-31 Transmitting type photoelectric switch Pending JPS5329574A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10310176A JPS5329574A (en) 1976-08-31 1976-08-31 Transmitting type photoelectric switch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10310176A JPS5329574A (en) 1976-08-31 1976-08-31 Transmitting type photoelectric switch

Publications (1)

Publication Number Publication Date
JPS5329574A true JPS5329574A (en) 1978-03-18

Family

ID=14345226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10310176A Pending JPS5329574A (en) 1976-08-31 1976-08-31 Transmitting type photoelectric switch

Country Status (1)

Country Link
JP (1) JPS5329574A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55500707A (en) * 1978-09-13 1980-09-25
JPS5688137A (en) * 1979-12-21 1981-07-17 Fujitsu Ltd X-ray transfer mask
JPS5691234A (en) * 1979-12-26 1981-07-24 Fujitsu Ltd Manufacture of mask for x-ray exposure
JPS5760840A (en) * 1980-09-30 1982-04-13 Nec Corp Manufacture of silicon mask for x-ray exposure
JPS58207635A (en) * 1982-05-28 1983-12-03 Seiko Epson Corp Membrane mask manufacturing method
JPS5931027A (en) * 1982-08-13 1984-02-18 Seiko Epson Corp Manufacture of x-ray mask
JPS5992531A (en) * 1982-11-17 1984-05-28 Mitsubishi Electric Corp Mask for x-ray exposure
JPS59116749A (en) * 1982-12-11 1984-07-05 ユ−ロジル・エレクトロニツク・ゲ−エムベ−ハ− Radiation mask for x ray lithography and manufacture thereof
JPS60220933A (en) * 1984-04-18 1985-11-05 Nec Corp X-ray exposing mask and manufacture thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5192128A (en) * 1975-02-12 1976-08-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5192128A (en) * 1975-02-12 1976-08-12

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55500707A (en) * 1978-09-13 1980-09-25
JPS5688137A (en) * 1979-12-21 1981-07-17 Fujitsu Ltd X-ray transfer mask
JPS5691234A (en) * 1979-12-26 1981-07-24 Fujitsu Ltd Manufacture of mask for x-ray exposure
JPS5760840A (en) * 1980-09-30 1982-04-13 Nec Corp Manufacture of silicon mask for x-ray exposure
JPS58207635A (en) * 1982-05-28 1983-12-03 Seiko Epson Corp Membrane mask manufacturing method
JPS5931027A (en) * 1982-08-13 1984-02-18 Seiko Epson Corp Manufacture of x-ray mask
JPS5992531A (en) * 1982-11-17 1984-05-28 Mitsubishi Electric Corp Mask for x-ray exposure
JPS59116749A (en) * 1982-12-11 1984-07-05 ユ−ロジル・エレクトロニツク・ゲ−エムベ−ハ− Radiation mask for x ray lithography and manufacture thereof
JPS60220933A (en) * 1984-04-18 1985-11-05 Nec Corp X-ray exposing mask and manufacture thereof

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