JPS5333068A - Electron beam exposure apparatus - Google Patents

Electron beam exposure apparatus

Info

Publication number
JPS5333068A
JPS5333068A JP10727476A JP10727476A JPS5333068A JP S5333068 A JPS5333068 A JP S5333068A JP 10727476 A JP10727476 A JP 10727476A JP 10727476 A JP10727476 A JP 10727476A JP S5333068 A JPS5333068 A JP S5333068A
Authority
JP
Japan
Prior art keywords
electron beam
exposure apparatus
beam exposure
dominoes
allowance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10727476A
Other languages
Japanese (ja)
Inventor
Kiyomi Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10727476A priority Critical patent/JPS5333068A/en
Publication of JPS5333068A publication Critical patent/JPS5333068A/en
Pending legal-status Critical Current

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  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To produce an allowance in the processing capacity of a computer and enhance the performance and reliability of the apparatus by reducing the transmission and reception of signals as small as possible, providing the function of a system clock to the signal being generated as the stage moves and causing each operation of the control system to take place in a falling-dominoes fashion.
COPYRIGHT: (C)1978,JPO&Japio
JP10727476A 1976-09-09 1976-09-09 Electron beam exposure apparatus Pending JPS5333068A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10727476A JPS5333068A (en) 1976-09-09 1976-09-09 Electron beam exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10727476A JPS5333068A (en) 1976-09-09 1976-09-09 Electron beam exposure apparatus

Publications (1)

Publication Number Publication Date
JPS5333068A true JPS5333068A (en) 1978-03-28

Family

ID=14454899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10727476A Pending JPS5333068A (en) 1976-09-09 1976-09-09 Electron beam exposure apparatus

Country Status (1)

Country Link
JP (1) JPS5333068A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58212134A (en) * 1982-01-28 1983-12-09 Toshiba Corp Evaluating method for characteristics of specimen base for charged beam exposure apparatus
JPS62192671A (en) * 1986-02-19 1987-08-24 Rohm Co Ltd Measuring method for electronic device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58212134A (en) * 1982-01-28 1983-12-09 Toshiba Corp Evaluating method for characteristics of specimen base for charged beam exposure apparatus
JPS62192671A (en) * 1986-02-19 1987-08-24 Rohm Co Ltd Measuring method for electronic device

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