JPS5333948B2 - - Google Patents
Info
- Publication number
- JPS5333948B2 JPS5333948B2 JP1851274A JP1851274A JPS5333948B2 JP S5333948 B2 JPS5333948 B2 JP S5333948B2 JP 1851274 A JP1851274 A JP 1851274A JP 1851274 A JP1851274 A JP 1851274A JP S5333948 B2 JPS5333948 B2 JP S5333948B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1851274A JPS5333948B2 (fr) | 1974-02-18 | 1974-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1851274A JPS5333948B2 (fr) | 1974-02-18 | 1974-02-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50121136A JPS50121136A (fr) | 1975-09-22 |
| JPS5333948B2 true JPS5333948B2 (fr) | 1978-09-18 |
Family
ID=11973670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1851274A Expired JPS5333948B2 (fr) | 1974-02-18 | 1974-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5333948B2 (fr) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4838313A (fr) * | 1971-09-18 | 1973-06-06 | ||
| JPS48110425U (fr) * | 1972-03-29 | 1973-12-19 |
-
1974
- 1974-02-18 JP JP1851274A patent/JPS5333948B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50121136A (fr) | 1975-09-22 |