JPS5339068B2 - - Google Patents
Info
- Publication number
- JPS5339068B2 JPS5339068B2 JP14296974A JP14296974A JPS5339068B2 JP S5339068 B2 JPS5339068 B2 JP S5339068B2 JP 14296974 A JP14296974 A JP 14296974A JP 14296974 A JP14296974 A JP 14296974A JP S5339068 B2 JPS5339068 B2 JP S5339068B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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- Turning (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14296974A JPS5169281A (ja) | 1974-12-12 | 1974-12-12 | Kosakukikaiyopuroguramuseigyosochi |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14296974A JPS5169281A (ja) | 1974-12-12 | 1974-12-12 | Kosakukikaiyopuroguramuseigyosochi |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5169281A JPS5169281A (ja) | 1976-06-15 |
| JPS5339068B2 true JPS5339068B2 (de) | 1978-10-19 |
Family
ID=15327856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14296974A Granted JPS5169281A (ja) | 1974-12-12 | 1974-12-12 | Kosakukikaiyopuroguramuseigyosochi |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5169281A (de) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6872984B1 (en) | 1998-07-29 | 2005-03-29 | Silicon Light Machines Corporation | Method of sealing a hermetic lid to a semiconductor die at an angle |
| US6908201B2 (en) | 2002-06-28 | 2005-06-21 | Silicon Light Machines Corporation | Micro-support structures |
| US6922272B1 (en) | 2003-02-14 | 2005-07-26 | Silicon Light Machines Corporation | Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices |
| US6922273B1 (en) | 2003-02-28 | 2005-07-26 | Silicon Light Machines Corporation | PDL mitigation structure for diffractive MEMS and gratings |
| US6934070B1 (en) | 2002-12-18 | 2005-08-23 | Silicon Light Machines Corporation | Chirped optical MEM device |
| US6947613B1 (en) | 2003-02-11 | 2005-09-20 | Silicon Light Machines Corporation | Wavelength selective switch and equalizer |
| US6956995B1 (en) | 2001-11-09 | 2005-10-18 | Silicon Light Machines Corporation | Optical communication arrangement |
| US6987600B1 (en) | 2002-12-17 | 2006-01-17 | Silicon Light Machines Corporation | Arbitrary phase profile for better equalization in dynamic gain equalizer |
| US7027202B1 (en) | 2003-02-28 | 2006-04-11 | Silicon Light Machines Corp | Silicon substrate as a light modulator sacrificial layer |
| US7042611B1 (en) | 2003-03-03 | 2006-05-09 | Silicon Light Machines Corporation | Pre-deflected bias ribbons |
| US7049164B2 (en) | 2001-09-13 | 2006-05-23 | Silicon Light Machines Corporation | Microelectronic mechanical system and methods |
| US7057795B2 (en) | 2002-08-20 | 2006-06-06 | Silicon Light Machines Corporation | Micro-structures with individually addressable ribbon pairs |
| US7057819B1 (en) | 2002-12-17 | 2006-06-06 | Silicon Light Machines Corporation | High contrast tilting ribbon blazed grating |
| US7177081B2 (en) | 2001-03-08 | 2007-02-13 | Silicon Light Machines Corporation | High contrast grating light valve type device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59124544A (ja) * | 1982-12-29 | 1984-07-18 | Mitsubishi Electric Corp | 数値制御装置の加工方式 |
-
1974
- 1974-12-12 JP JP14296974A patent/JPS5169281A/ja active Granted
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6872984B1 (en) | 1998-07-29 | 2005-03-29 | Silicon Light Machines Corporation | Method of sealing a hermetic lid to a semiconductor die at an angle |
| US7177081B2 (en) | 2001-03-08 | 2007-02-13 | Silicon Light Machines Corporation | High contrast grating light valve type device |
| US7049164B2 (en) | 2001-09-13 | 2006-05-23 | Silicon Light Machines Corporation | Microelectronic mechanical system and methods |
| US6956995B1 (en) | 2001-11-09 | 2005-10-18 | Silicon Light Machines Corporation | Optical communication arrangement |
| US6908201B2 (en) | 2002-06-28 | 2005-06-21 | Silicon Light Machines Corporation | Micro-support structures |
| US7057795B2 (en) | 2002-08-20 | 2006-06-06 | Silicon Light Machines Corporation | Micro-structures with individually addressable ribbon pairs |
| US6987600B1 (en) | 2002-12-17 | 2006-01-17 | Silicon Light Machines Corporation | Arbitrary phase profile for better equalization in dynamic gain equalizer |
| US7057819B1 (en) | 2002-12-17 | 2006-06-06 | Silicon Light Machines Corporation | High contrast tilting ribbon blazed grating |
| US6934070B1 (en) | 2002-12-18 | 2005-08-23 | Silicon Light Machines Corporation | Chirped optical MEM device |
| US6947613B1 (en) | 2003-02-11 | 2005-09-20 | Silicon Light Machines Corporation | Wavelength selective switch and equalizer |
| US6922272B1 (en) | 2003-02-14 | 2005-07-26 | Silicon Light Machines Corporation | Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices |
| US6922273B1 (en) | 2003-02-28 | 2005-07-26 | Silicon Light Machines Corporation | PDL mitigation structure for diffractive MEMS and gratings |
| US7027202B1 (en) | 2003-02-28 | 2006-04-11 | Silicon Light Machines Corp | Silicon substrate as a light modulator sacrificial layer |
| US7042611B1 (en) | 2003-03-03 | 2006-05-09 | Silicon Light Machines Corporation | Pre-deflected bias ribbons |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5169281A (ja) | 1976-06-15 |