JPS5342636A - Setting condition output system of data gathering equipment - Google Patents

Setting condition output system of data gathering equipment

Info

Publication number
JPS5342636A
JPS5342636A JP11773476A JP11773476A JPS5342636A JP S5342636 A JPS5342636 A JP S5342636A JP 11773476 A JP11773476 A JP 11773476A JP 11773476 A JP11773476 A JP 11773476A JP S5342636 A JPS5342636 A JP S5342636A
Authority
JP
Japan
Prior art keywords
setting condition
data gathering
output system
condition output
gathering equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11773476A
Other languages
Japanese (ja)
Inventor
Kazuaki Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP11773476A priority Critical patent/JPS5342636A/en
Publication of JPS5342636A publication Critical patent/JPS5342636A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: The data gathering and data inputting are indeoendently controlled by turns and even if the instryction of outputting a setting condition list is transmittted, the data gathering is made continue, thereby outputting the setting condition list immediately.
COPYRIGHT: (C)1978,JPO&Japio
JP11773476A 1976-09-30 1976-09-30 Setting condition output system of data gathering equipment Pending JPS5342636A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11773476A JPS5342636A (en) 1976-09-30 1976-09-30 Setting condition output system of data gathering equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11773476A JPS5342636A (en) 1976-09-30 1976-09-30 Setting condition output system of data gathering equipment

Publications (1)

Publication Number Publication Date
JPS5342636A true JPS5342636A (en) 1978-04-18

Family

ID=14718955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11773476A Pending JPS5342636A (en) 1976-09-30 1976-09-30 Setting condition output system of data gathering equipment

Country Status (1)

Country Link
JP (1) JPS5342636A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61501603A (en) * 1984-03-01 1986-07-31 ボック、エドワ−ド Improved equipment for vacuum processing of substrates
JPS61502364A (en) * 1984-06-04 1986-10-16 ボック、エドワ−ド Improved dual floating wafer transport and processing equipment
JPS61502363A (en) * 1984-06-04 1986-10-16 ボック、エドワ−ド Gaseous locking of tunnel entrance and exit in double floating wafer transport and processing

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50156343A (en) * 1974-06-05 1975-12-17
JPS5124850A (en) * 1974-08-26 1976-02-28 Oki Electric Ind Co Ltd DOSAKIROKUSOCHI

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50156343A (en) * 1974-06-05 1975-12-17
JPS5124850A (en) * 1974-08-26 1976-02-28 Oki Electric Ind Co Ltd DOSAKIROKUSOCHI

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61501603A (en) * 1984-03-01 1986-07-31 ボック、エドワ−ド Improved equipment for vacuum processing of substrates
JPS61502364A (en) * 1984-06-04 1986-10-16 ボック、エドワ−ド Improved dual floating wafer transport and processing equipment
JPS61502363A (en) * 1984-06-04 1986-10-16 ボック、エドワ−ド Gaseous locking of tunnel entrance and exit in double floating wafer transport and processing

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