JPS5351976A - Wafer feeder - Google Patents

Wafer feeder

Info

Publication number
JPS5351976A
JPS5351976A JP12605076A JP12605076A JPS5351976A JP S5351976 A JPS5351976 A JP S5351976A JP 12605076 A JP12605076 A JP 12605076A JP 12605076 A JP12605076 A JP 12605076A JP S5351976 A JPS5351976 A JP S5351976A
Authority
JP
Japan
Prior art keywords
wafer
wafer feeder
quickly
feed
slide plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12605076A
Other languages
Japanese (ja)
Inventor
Katsumi Tokikuchi
Kuniyuki Sakumichi
Hideki Koike
Ichiro Shikamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12605076A priority Critical patent/JPS5351976A/en
Publication of JPS5351976A publication Critical patent/JPS5351976A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the wafer falling speed, to prevent damage, and to feed the wafer to the hold stand surely and quickly, by providing the stopper operated with the photo detector and this signal on the way of slide plate.
COPYRIGHT: (C)1978,JPO&Japio
JP12605076A 1976-10-22 1976-10-22 Wafer feeder Pending JPS5351976A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12605076A JPS5351976A (en) 1976-10-22 1976-10-22 Wafer feeder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12605076A JPS5351976A (en) 1976-10-22 1976-10-22 Wafer feeder

Publications (1)

Publication Number Publication Date
JPS5351976A true JPS5351976A (en) 1978-05-11

Family

ID=14925399

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12605076A Pending JPS5351976A (en) 1976-10-22 1976-10-22 Wafer feeder

Country Status (1)

Country Link
JP (1) JPS5351976A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164552U (en) * 1980-05-10 1981-12-07
JPS58140961A (en) * 1982-02-17 1983-08-20 Hitachi Ltd Wafer-sending device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164552U (en) * 1980-05-10 1981-12-07
JPS58140961A (en) * 1982-02-17 1983-08-20 Hitachi Ltd Wafer-sending device

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