JPS5352385A - Electrode formation method - Google Patents

Electrode formation method

Info

Publication number
JPS5352385A
JPS5352385A JP12724976A JP12724976A JPS5352385A JP S5352385 A JPS5352385 A JP S5352385A JP 12724976 A JP12724976 A JP 12724976A JP 12724976 A JP12724976 A JP 12724976A JP S5352385 A JPS5352385 A JP S5352385A
Authority
JP
Japan
Prior art keywords
electrode formation
formation method
gas
titanim
substituting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12724976A
Other languages
Japanese (ja)
Inventor
Tetsuro Hino
Hiroshi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12724976A priority Critical patent/JPS5352385A/en
Publication of JPS5352385A publication Critical patent/JPS5352385A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PURPOSE:In electrode formation including a titanium layer, gas of argon is used in place of nitrogen in substituting a reductive gas, whereby titanim annealing of not producing detrimental products of reaction is made possible.
JP12724976A 1976-10-25 1976-10-25 Electrode formation method Pending JPS5352385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12724976A JPS5352385A (en) 1976-10-25 1976-10-25 Electrode formation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12724976A JPS5352385A (en) 1976-10-25 1976-10-25 Electrode formation method

Publications (1)

Publication Number Publication Date
JPS5352385A true JPS5352385A (en) 1978-05-12

Family

ID=14955373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12724976A Pending JPS5352385A (en) 1976-10-25 1976-10-25 Electrode formation method

Country Status (1)

Country Link
JP (1) JPS5352385A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4984786A (en) * 1972-12-21 1974-08-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4984786A (en) * 1972-12-21 1974-08-14

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