JPS535497A - Electric beam current control circuit - Google Patents

Electric beam current control circuit

Info

Publication number
JPS535497A
JPS535497A JP8029976A JP8029976A JPS535497A JP S535497 A JPS535497 A JP S535497A JP 8029976 A JP8029976 A JP 8029976A JP 8029976 A JP8029976 A JP 8029976A JP S535497 A JPS535497 A JP S535497A
Authority
JP
Japan
Prior art keywords
control circuit
current control
beam current
electric beam
cut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8029976A
Other languages
Japanese (ja)
Other versions
JPS5851385B2 (en
Inventor
Seiichi Tsukamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP51080299A priority Critical patent/JPS5851385B2/en
Publication of JPS535497A publication Critical patent/JPS535497A/en
Publication of JPS5851385B2 publication Critical patent/JPS5851385B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To cut an electronic beam without increasing a cut-off bias thereby to nullify the need for increase of a dielectric strength, and prevent a discharge between a hot cathode and a Wehnelt electrode thereby to prevent a damage to a jig in a beam chamber when the beam is irradiated incidentally.
COPYRIGHT: (C)1978,JPO&Japio
JP51080299A 1976-07-06 1976-07-06 Beam current control circuit Expired JPS5851385B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51080299A JPS5851385B2 (en) 1976-07-06 1976-07-06 Beam current control circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51080299A JPS5851385B2 (en) 1976-07-06 1976-07-06 Beam current control circuit

Publications (2)

Publication Number Publication Date
JPS535497A true JPS535497A (en) 1978-01-19
JPS5851385B2 JPS5851385B2 (en) 1983-11-16

Family

ID=13714384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51080299A Expired JPS5851385B2 (en) 1976-07-06 1976-07-06 Beam current control circuit

Country Status (1)

Country Link
JP (1) JPS5851385B2 (en)

Also Published As

Publication number Publication date
JPS5851385B2 (en) 1983-11-16

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