JPS5360558A - Electron lens - Google Patents

Electron lens

Info

Publication number
JPS5360558A
JPS5360558A JP13531876A JP13531876A JPS5360558A JP S5360558 A JPS5360558 A JP S5360558A JP 13531876 A JP13531876 A JP 13531876A JP 13531876 A JP13531876 A JP 13531876A JP S5360558 A JPS5360558 A JP S5360558A
Authority
JP
Japan
Prior art keywords
electron lens
coil
growing
internal
improved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13531876A
Other languages
Japanese (ja)
Inventor
Michio Yanatori
Toshiji Hara
Tatsuo Goto
Teiji Katsuta
Kazuyoshi Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13531876A priority Critical patent/JPS5360558A/en
Publication of JPS5360558A publication Critical patent/JPS5360558A/en
Pending legal-status Critical Current

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Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: The cooling effect of the internal and external faces of the coil of an electron lens is improved through a simple method, thereby growing currents used by the coil.
COPYRIGHT: (C)1978,JPO&Japio
JP13531876A 1976-11-12 1976-11-12 Electron lens Pending JPS5360558A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13531876A JPS5360558A (en) 1976-11-12 1976-11-12 Electron lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13531876A JPS5360558A (en) 1976-11-12 1976-11-12 Electron lens

Publications (1)

Publication Number Publication Date
JPS5360558A true JPS5360558A (en) 1978-05-31

Family

ID=15148931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13531876A Pending JPS5360558A (en) 1976-11-12 1976-11-12 Electron lens

Country Status (1)

Country Link
JP (1) JPS5360558A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60245132A (en) * 1984-05-21 1985-12-04 Toshiba Corp Electronic lens of electron beam exposure device and the like

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60245132A (en) * 1984-05-21 1985-12-04 Toshiba Corp Electronic lens of electron beam exposure device and the like

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