JPS5366151A - Electron gun unit of electron microscope and equivalent unit - Google Patents

Electron gun unit of electron microscope and equivalent unit

Info

Publication number
JPS5366151A
JPS5366151A JP14114776A JP14114776A JPS5366151A JP S5366151 A JPS5366151 A JP S5366151A JP 14114776 A JP14114776 A JP 14114776A JP 14114776 A JP14114776 A JP 14114776A JP S5366151 A JPS5366151 A JP S5366151A
Authority
JP
Japan
Prior art keywords
unit
electron gun
electron
equivalent
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14114776A
Other languages
English (en)
Inventor
Isao Matsui
Yoshihisa Namikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14114776A priority Critical patent/JPS5366151A/ja
Publication of JPS5366151A publication Critical patent/JPS5366151A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP14114776A 1976-11-26 1976-11-26 Electron gun unit of electron microscope and equivalent unit Pending JPS5366151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14114776A JPS5366151A (en) 1976-11-26 1976-11-26 Electron gun unit of electron microscope and equivalent unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14114776A JPS5366151A (en) 1976-11-26 1976-11-26 Electron gun unit of electron microscope and equivalent unit

Publications (1)

Publication Number Publication Date
JPS5366151A true JPS5366151A (en) 1978-06-13

Family

ID=15285238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14114776A Pending JPS5366151A (en) 1976-11-26 1976-11-26 Electron gun unit of electron microscope and equivalent unit

Country Status (1)

Country Link
JP (1) JPS5366151A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003504605A (ja) * 1999-07-09 2003-02-04 アドバンスト・エレクトロン・ビームズ・インコーポレーテッド 電子ビーム加速器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49115467A (ja) * 1973-03-03 1974-11-05
JPS5184568A (en) * 1975-01-22 1976-07-23 Nippon Electron Optics Lab Denkaihoshutsugatadenshiju
JPS5362977A (en) * 1976-11-17 1978-06-05 Hitachi Ltd Plane face pressure insulated electron gun

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49115467A (ja) * 1973-03-03 1974-11-05
JPS5184568A (en) * 1975-01-22 1976-07-23 Nippon Electron Optics Lab Denkaihoshutsugatadenshiju
JPS5362977A (en) * 1976-11-17 1978-06-05 Hitachi Ltd Plane face pressure insulated electron gun

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003504605A (ja) * 1999-07-09 2003-02-04 アドバンスト・エレクトロン・ビームズ・インコーポレーテッド 電子ビーム加速器

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