JPS5366157A - Method for semiconductor processing - Google Patents

Method for semiconductor processing

Info

Publication number
JPS5366157A
JPS5366157A JP14121176A JP14121176A JPS5366157A JP S5366157 A JPS5366157 A JP S5366157A JP 14121176 A JP14121176 A JP 14121176A JP 14121176 A JP14121176 A JP 14121176A JP S5366157 A JPS5366157 A JP S5366157A
Authority
JP
Japan
Prior art keywords
semiconductor processing
layers
yield
improve
generated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14121176A
Other languages
English (en)
Inventor
Shusuke Kotake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14121176A priority Critical patent/JPS5366157A/ja
Publication of JPS5366157A publication Critical patent/JPS5366157A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Dicing (AREA)
JP14121176A 1976-11-26 1976-11-26 Method for semiconductor processing Pending JPS5366157A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14121176A JPS5366157A (en) 1976-11-26 1976-11-26 Method for semiconductor processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14121176A JPS5366157A (en) 1976-11-26 1976-11-26 Method for semiconductor processing

Publications (1)

Publication Number Publication Date
JPS5366157A true JPS5366157A (en) 1978-06-13

Family

ID=15286714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14121176A Pending JPS5366157A (en) 1976-11-26 1976-11-26 Method for semiconductor processing

Country Status (1)

Country Link
JP (1) JPS5366157A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63266851A (ja) * 1987-04-24 1988-11-02 Mitsubishi Monsanto Chem Co 半導体素子分離方法
WO2007015354A1 (ja) * 2005-08-01 2007-02-08 Sharp Kabushiki Kaisha 光電変換素子の製造方法および光電変換素子

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63266851A (ja) * 1987-04-24 1988-11-02 Mitsubishi Monsanto Chem Co 半導体素子分離方法
WO2007015354A1 (ja) * 2005-08-01 2007-02-08 Sharp Kabushiki Kaisha 光電変換素子の製造方法および光電変換素子
JP2007042739A (ja) * 2005-08-01 2007-02-15 Sharp Corp 光電変換素子の製造方法および光電変換素子

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