JPS5366347A - Manufacture for elastic surface wave element - Google Patents

Manufacture for elastic surface wave element

Info

Publication number
JPS5366347A
JPS5366347A JP14265976A JP14265976A JPS5366347A JP S5366347 A JPS5366347 A JP S5366347A JP 14265976 A JP14265976 A JP 14265976A JP 14265976 A JP14265976 A JP 14265976A JP S5366347 A JPS5366347 A JP S5366347A
Authority
JP
Japan
Prior art keywords
manufacture
surface wave
wave element
elastic surface
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14265976A
Other languages
Japanese (ja)
Inventor
Takeshi Namikata
Takeshi Kamo
Junji Inui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14265976A priority Critical patent/JPS5366347A/en
Publication of JPS5366347A publication Critical patent/JPS5366347A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To increase the adhesive strength and to form a thick film in a short time, by forming the second SiO2 film with evaporation method after the first SiO2 film is formed with spatter method or CVD method.
JP14265976A 1976-11-26 1976-11-26 Manufacture for elastic surface wave element Pending JPS5366347A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14265976A JPS5366347A (en) 1976-11-26 1976-11-26 Manufacture for elastic surface wave element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14265976A JPS5366347A (en) 1976-11-26 1976-11-26 Manufacture for elastic surface wave element

Publications (1)

Publication Number Publication Date
JPS5366347A true JPS5366347A (en) 1978-06-13

Family

ID=15320498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14265976A Pending JPS5366347A (en) 1976-11-26 1976-11-26 Manufacture for elastic surface wave element

Country Status (1)

Country Link
JP (1) JPS5366347A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02123808A (en) * 1988-11-01 1990-05-11 Fujitsu Ltd Manufacture of surface wave device
CN110320626A (en) * 2018-03-30 2019-10-11 日本电产三协（东莞）工机有限公司 Cemented lens

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02123808A (en) * 1988-11-01 1990-05-11 Fujitsu Ltd Manufacture of surface wave device
CN110320626A (en) * 2018-03-30 2019-10-11 日本电产三协（东莞）工机有限公司 Cemented lens

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