JPS5367352A - Measuring method of resistivity for double-layer film - Google Patents

Measuring method of resistivity for double-layer film

Info

Publication number
JPS5367352A
JPS5367352A JP14275976A JP14275976A JPS5367352A JP S5367352 A JPS5367352 A JP S5367352A JP 14275976 A JP14275976 A JP 14275976A JP 14275976 A JP14275976 A JP 14275976A JP S5367352 A JPS5367352 A JP S5367352A
Authority
JP
Japan
Prior art keywords
resistivity
layer film
double
measuring method
simultaneous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14275976A
Other languages
Japanese (ja)
Other versions
JPS566144B2 (en
Inventor
Masuji Sato
Yoshio Shiozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14275976A priority Critical patent/JPS5367352A/en
Publication of JPS5367352A publication Critical patent/JPS5367352A/en
Publication of JPS566144B2 publication Critical patent/JPS566144B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To secure a simultaneous and independent measurement of the resistivity for each of the same conduction type double-layer film through a simple structure.
COPYRIGHT: (C)1978,JPO&Japio
JP14275976A 1976-11-27 1976-11-27 Measuring method of resistivity for double-layer film Granted JPS5367352A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14275976A JPS5367352A (en) 1976-11-27 1976-11-27 Measuring method of resistivity for double-layer film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14275976A JPS5367352A (en) 1976-11-27 1976-11-27 Measuring method of resistivity for double-layer film

Publications (2)

Publication Number Publication Date
JPS5367352A true JPS5367352A (en) 1978-06-15
JPS566144B2 JPS566144B2 (en) 1981-02-09

Family

ID=15322904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14275976A Granted JPS5367352A (en) 1976-11-27 1976-11-27 Measuring method of resistivity for double-layer film

Country Status (1)

Country Link
JP (1) JPS5367352A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58145140A (en) * 1982-02-23 1983-08-29 Nec Corp Semiconductor characteristic measuring device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58145140A (en) * 1982-02-23 1983-08-29 Nec Corp Semiconductor characteristic measuring device

Also Published As

Publication number Publication date
JPS566144B2 (en) 1981-02-09

Similar Documents

Publication Publication Date Title
IT1086515B (en) COMPLEX COMPOUNDS, PROCEDURE FOR THEIR PREPARATION AND USE
AU513588B2 (en) Thermal conductivity detector
IT1075298B (en) AMINOALKYLPIRROLBENZOSSAZALCANI AND METHOD FOR THEIR PREPARATION
IT1075299B (en) PIRROLBENZOSSAZALCANI AND METHOD FOR THEIR PREPARATION
IT1075712B (en) ACILAMINO (ALCHIL) BENZENDERIVATI AND PROCEDURE FOR THEIR PREPARATION
JPS51126733A (en) Bubble memory characteristic measuring method.
JPS5334070A (en) Oilhydraulic system failure diagnosis
JPS5337472A (en) Frequency comparator
JPS5228872A (en) Method for measuring the size of thin plane
JPS53145673A (en) Level measuring system
JPS51124948A (en) Method and apparatus for measuring posture angle
JPS5355059A (en) Multiidirectional measuring method
JPS5329499A (en) Measuring method of pre-critical degree
JPS5227661A (en) Inclination meter
JPS5313965A (en) Synchronism indicator
JPS53116069A (en) Measuring method for amount of ion injection
JPS52143515A (en) Tube dividing device
JPS5314350A (en) Current detector
JPS5216086A (en) Plastic pipe cutter
JPS5334453A (en) Phase detector
JPS5223377A (en) Viscosity measuring method
JPS5382450A (en) Method and apparatus of measuring dimensions
JPS5218397A (en) Apparatus for measuring conductivit of fluid
JPS5211989A (en) Cereals moisture meter
JPS5322452A (en) Size measuring device