JPS5367643A - Ionic etching method - Google Patents

Ionic etching method

Info

Publication number
JPS5367643A
JPS5367643A JP14291876A JP14291876A JPS5367643A JP S5367643 A JPS5367643 A JP S5367643A JP 14291876 A JP14291876 A JP 14291876A JP 14291876 A JP14291876 A JP 14291876A JP S5367643 A JPS5367643 A JP S5367643A
Authority
JP
Japan
Prior art keywords
etching method
ionic etching
ionic
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14291876A
Other languages
Japanese (ja)
Other versions
JPS5811511B2 (en
Inventor
Hiroshi Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP14291876A priority Critical patent/JPS5811511B2/en
Priority to US05/855,639 priority patent/US4232439A/en
Publication of JPS5367643A publication Critical patent/JPS5367643A/en
Publication of JPS5811511B2 publication Critical patent/JPS5811511B2/en
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP14291876A 1976-11-30 1976-11-30 Ion etching method Expired JPS5811511B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP14291876A JPS5811511B2 (en) 1976-11-30 1976-11-30 Ion etching method
US05/855,639 US4232439A (en) 1976-11-30 1977-11-29 Masking technique usable in manufacturing semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14291876A JPS5811511B2 (en) 1976-11-30 1976-11-30 Ion etching method

Publications (2)

Publication Number Publication Date
JPS5367643A true JPS5367643A (en) 1978-06-16
JPS5811511B2 JPS5811511B2 (en) 1983-03-03

Family

ID=15326642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14291876A Expired JPS5811511B2 (en) 1976-11-30 1976-11-30 Ion etching method

Country Status (1)

Country Link
JP (1) JPS5811511B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015060047A1 (en) * 2013-10-24 2015-04-30 コニカミノルタ株式会社 Precision polishing device and method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0221209U (en) * 1988-07-26 1990-02-13

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015060047A1 (en) * 2013-10-24 2015-04-30 コニカミノルタ株式会社 Precision polishing device and method
JPWO2015060047A1 (en) * 2013-10-24 2017-03-09 コニカミノルタ株式会社 Precision polishing apparatus and method

Also Published As

Publication number Publication date
JPS5811511B2 (en) 1983-03-03

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