JPS5368169A - Photoetching method - Google Patents

Photoetching method

Info

Publication number
JPS5368169A
JPS5368169A JP14356576A JP14356576A JPS5368169A JP S5368169 A JPS5368169 A JP S5368169A JP 14356576 A JP14356576 A JP 14356576A JP 14356576 A JP14356576 A JP 14356576A JP S5368169 A JPS5368169 A JP S5368169A
Authority
JP
Japan
Prior art keywords
photoetching method
photoetching
etching
treating solution
continuously performing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14356576A
Other languages
Japanese (ja)
Inventor
Michio Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14356576A priority Critical patent/JPS5368169A/en
Publication of JPS5368169A publication Critical patent/JPS5368169A/en
Pending legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To perform photoetching by continuously performing developing and etching with the same treating solution.
COPYRIGHT: (C)1978,JPO&Japio
JP14356576A 1976-11-30 1976-11-30 Photoetching method Pending JPS5368169A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14356576A JPS5368169A (en) 1976-11-30 1976-11-30 Photoetching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14356576A JPS5368169A (en) 1976-11-30 1976-11-30 Photoetching method

Publications (1)

Publication Number Publication Date
JPS5368169A true JPS5368169A (en) 1978-06-17

Family

ID=15341696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14356576A Pending JPS5368169A (en) 1976-11-30 1976-11-30 Photoetching method

Country Status (1)

Country Link
JP (1) JPS5368169A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01278793A (en) * 1988-05-02 1989-11-09 Mitsubishi Electric Corp Positive type image forming method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01278793A (en) * 1988-05-02 1989-11-09 Mitsubishi Electric Corp Positive type image forming method

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