JPS5371585A - Electrode formation method - Google Patents

Electrode formation method

Info

Publication number
JPS5371585A
JPS5371585A JP14652076A JP14652076A JPS5371585A JP S5371585 A JPS5371585 A JP S5371585A JP 14652076 A JP14652076 A JP 14652076A JP 14652076 A JP14652076 A JP 14652076A JP S5371585 A JPS5371585 A JP S5371585A
Authority
JP
Japan
Prior art keywords
formation method
electrode formation
etching
electrode
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14652076A
Other languages
Japanese (ja)
Inventor
Masamichi Kobayashi
Tatsuya Itagaki
Hiroshi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14652076A priority Critical patent/JPS5371585A/en
Publication of JPS5371585A publication Critical patent/JPS5371585A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To obtain the electrode of a minute pattern laminated with Pt and Au by selectively plasma-etching or sputter-etching a Pt layer with the Au layer covering on it taken as a mask.
COPYRIGHT: (C)1978,JPO&Japio
JP14652076A 1976-12-08 1976-12-08 Electrode formation method Pending JPS5371585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14652076A JPS5371585A (en) 1976-12-08 1976-12-08 Electrode formation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14652076A JPS5371585A (en) 1976-12-08 1976-12-08 Electrode formation method

Publications (1)

Publication Number Publication Date
JPS5371585A true JPS5371585A (en) 1978-06-26

Family

ID=15409499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14652076A Pending JPS5371585A (en) 1976-12-08 1976-12-08 Electrode formation method

Country Status (1)

Country Link
JP (1) JPS5371585A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56148824A (en) * 1980-04-21 1981-11-18 Nec Corp Formation of electrode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56148824A (en) * 1980-04-21 1981-11-18 Nec Corp Formation of electrode

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