JPS537175A - Minute marking method on semiconductor element surface - Google Patents

Minute marking method on semiconductor element surface

Info

Publication number
JPS537175A
JPS537175A JP8169776A JP8169776A JPS537175A JP S537175 A JPS537175 A JP S537175A JP 8169776 A JP8169776 A JP 8169776A JP 8169776 A JP8169776 A JP 8169776A JP S537175 A JPS537175 A JP S537175A
Authority
JP
Japan
Prior art keywords
semiconductor element
element surface
marking method
minute marking
minute
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8169776A
Other languages
Japanese (ja)
Inventor
Hirozo Takano
Sunao Nishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8169776A priority Critical patent/JPS537175A/en
Publication of JPS537175A publication Critical patent/JPS537175A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To perform minute marking on semiconductor element surface positively and rapidly while observing the mark with visible light by superposing a laser light beam on the optical axis of a polarization microscope.
COPYRIGHT: (C)1978,JPO&Japio
JP8169776A 1976-07-08 1976-07-08 Minute marking method on semiconductor element surface Pending JPS537175A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8169776A JPS537175A (en) 1976-07-08 1976-07-08 Minute marking method on semiconductor element surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8169776A JPS537175A (en) 1976-07-08 1976-07-08 Minute marking method on semiconductor element surface

Publications (1)

Publication Number Publication Date
JPS537175A true JPS537175A (en) 1978-01-23

Family

ID=13753554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8169776A Pending JPS537175A (en) 1976-07-08 1976-07-08 Minute marking method on semiconductor element surface

Country Status (1)

Country Link
JP (1) JPS537175A (en)

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