JPS537199A - Plasma generator - Google Patents

Plasma generator

Info

Publication number
JPS537199A
JPS537199A JP8172076A JP8172076A JPS537199A JP S537199 A JPS537199 A JP S537199A JP 8172076 A JP8172076 A JP 8172076A JP 8172076 A JP8172076 A JP 8172076A JP S537199 A JPS537199 A JP S537199A
Authority
JP
Japan
Prior art keywords
plasma generator
plasma
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8172076A
Other languages
Japanese (ja)
Other versions
JPS5546640B2 (en
Inventor
Moritake Tanba
Yuuichi Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP8172076A priority Critical patent/JPS537199A/en
Publication of JPS537199A publication Critical patent/JPS537199A/en
Publication of JPS5546640B2 publication Critical patent/JPS5546640B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)
JP8172076A 1976-07-09 1976-07-09 Plasma generator Granted JPS537199A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8172076A JPS537199A (en) 1976-07-09 1976-07-09 Plasma generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8172076A JPS537199A (en) 1976-07-09 1976-07-09 Plasma generator

Publications (2)

Publication Number Publication Date
JPS537199A true JPS537199A (en) 1978-01-23
JPS5546640B2 JPS5546640B2 (en) 1980-11-25

Family

ID=13754240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8172076A Granted JPS537199A (en) 1976-07-09 1976-07-09 Plasma generator

Country Status (1)

Country Link
JP (1) JPS537199A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56128600A (en) * 1980-02-13 1981-10-08 Commissariat Energie Atomique Method and device for producing large ion highly charged and utility using same method
JPH01161651A (en) * 1987-12-18 1989-06-26 Hitachi Ltd Plasma small amount element analyzer
JPH01283745A (en) * 1988-05-11 1989-11-15 Hitachi Ltd Plasma generator and plasma elemental analyzer
JPH088238A (en) * 1995-05-10 1996-01-12 Hitachi Ltd Processing method and processing device
JP2003264099A (en) * 2002-03-08 2003-09-19 Shibaura Mechatronics Corp Plasma generator

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56128600A (en) * 1980-02-13 1981-10-08 Commissariat Energie Atomique Method and device for producing large ion highly charged and utility using same method
JPH01161651A (en) * 1987-12-18 1989-06-26 Hitachi Ltd Plasma small amount element analyzer
JPH01283745A (en) * 1988-05-11 1989-11-15 Hitachi Ltd Plasma generator and plasma elemental analyzer
JPH088238A (en) * 1995-05-10 1996-01-12 Hitachi Ltd Processing method and processing device
JP2003264099A (en) * 2002-03-08 2003-09-19 Shibaura Mechatronics Corp Plasma generator

Also Published As

Publication number Publication date
JPS5546640B2 (en) 1980-11-25

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