JPS5373500A - Method and apparatus for metallizing silicon carbide - Google Patents

Method and apparatus for metallizing silicon carbide

Info

Publication number: JPS5373500A
Authority: JP; Japan
Prior art keywords: silicon carbide; metallizing; metallizing silicon; carbide; silicon
Prior art date: 1976-11-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP14428976A

Other languages

Japanese (ja)

Other versions

JPS565686B2 (en

Inventor

Kichiya Yano

Hisashi Kinugasa

Yasuhiro Akune

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Nippon Pillar Packing Co Ltd

Original Assignee

Nippon Pillar Packing Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1976-11-30

Filing date

1976-11-30

Publication date

1978-06-29

1976-11-30 Application filed by Nippon Pillar Packing Co Ltd filed Critical Nippon Pillar Packing Co Ltd

1976-11-30 Priority to JP14428976A priority Critical patent/JPS5373500A/en

1978-06-29 Publication of JPS5373500A publication Critical patent/JPS5373500A/en

1981-02-06 Publication of JPS565686B2 publication Critical patent/JPS565686B2/ja

Status Granted legal-status Critical Current

Links

HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title 1
229910010271 silicon carbide Inorganic materials 0.000 title 1

Landscapes

Physical Vapour Deposition (AREA)
Chemical Vapour Deposition (AREA)

JP14428976A 1976-11-30 1976-11-30 Method and apparatus for metallizing silicon carbide Granted JPS5373500A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP14428976A JPS5373500A (en)	1976-11-30	1976-11-30	Method and apparatus for metallizing silicon carbide

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP14428976A JPS5373500A (en)	1976-11-30	1976-11-30	Method and apparatus for metallizing silicon carbide

Publications (2)

Publication Number	Publication Date
JPS5373500A true JPS5373500A (en)	1978-06-29
JPS565686B2 JPS565686B2 (en)	1981-02-06

Family

ID=15358597

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP14428976A Granted JPS5373500A (en)	1976-11-30	1976-11-30	Method and apparatus for metallizing silicon carbide

Country Status (1)

Country	Link
JP (1)	JPS5373500A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5774978U (en) *	1980-10-20	1982-05-08

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4937040A (en) *	1972-08-14	1974-04-06

1976
- 1976-11-30 JP JP14428976A patent/JPS5373500A/en active Granted

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4937040A (en) *	1972-08-14	1974-04-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5774978U (en) *	1980-10-20	1982-05-08

Also Published As

Publication number	Publication date
JPS565686B2 (en)	1981-02-06

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