JPS537585A - Spattering apparatus of horizontalltype discharge with cross magnetic field - Google Patents

Spattering apparatus of horizontalltype discharge with cross magnetic field

Info

Publication number
JPS537585A
JPS537585A JP8220976A JP8220976A JPS537585A JP S537585 A JPS537585 A JP S537585A JP 8220976 A JP8220976 A JP 8220976A JP 8220976 A JP8220976 A JP 8220976A JP S537585 A JPS537585 A JP S537585A
Authority
JP
Japan
Prior art keywords
horizontalltype
discharge
magnetic field
cross magnetic
spattering apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8220976A
Other languages
Japanese (ja)
Inventor
Makoto Katsurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP8220976A priority Critical patent/JPS537585A/en
Publication of JPS537585A publication Critical patent/JPS537585A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8220976A 1976-07-10 1976-07-10 Spattering apparatus of horizontalltype discharge with cross magnetic field Pending JPS537585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8220976A JPS537585A (en) 1976-07-10 1976-07-10 Spattering apparatus of horizontalltype discharge with cross magnetic field

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8220976A JPS537585A (en) 1976-07-10 1976-07-10 Spattering apparatus of horizontalltype discharge with cross magnetic field

Publications (1)

Publication Number Publication Date
JPS537585A true JPS537585A (en) 1978-01-24

Family

ID=13768023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8220976A Pending JPS537585A (en) 1976-07-10 1976-07-10 Spattering apparatus of horizontalltype discharge with cross magnetic field

Country Status (1)

Country Link
JP (1) JPS537585A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5047394A (en) * 1989-09-12 1991-09-10 University Of Houston System Sputtering method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS473154U (en) * 1971-01-29 1972-09-02
JPS4825401U (en) * 1971-08-02 1973-03-26
JPS4942663U (en) * 1972-07-19 1974-04-15
JPS5061382A (en) * 1973-10-02 1975-05-26
JPS50160181A (en) * 1974-06-20 1975-12-25

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS473154U (en) * 1971-01-29 1972-09-02
JPS4825401U (en) * 1971-08-02 1973-03-26
JPS4942663U (en) * 1972-07-19 1974-04-15
JPS5061382A (en) * 1973-10-02 1975-05-26
JPS50160181A (en) * 1974-06-20 1975-12-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5047394A (en) * 1989-09-12 1991-09-10 University Of Houston System Sputtering method

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