JPS5376747A - Forming method of insulation film - Google Patents

Forming method of insulation film

Info

Publication number
JPS5376747A
JPS5376747A JP15190376A JP15190376A JPS5376747A JP S5376747 A JPS5376747 A JP S5376747A JP 15190376 A JP15190376 A JP 15190376A JP 15190376 A JP15190376 A JP 15190376A JP S5376747 A JPS5376747 A JP S5376747A
Authority
JP
Japan
Prior art keywords
insulation film
forming method
film
coating
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15190376A
Other languages
Japanese (ja)
Inventor
Takayuki Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15190376A priority Critical patent/JPS5376747A/en
Publication of JPS5376747A publication Critical patent/JPS5376747A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To form a uniform film by making combined use of rotation and heating in coating an insulation film on substrate surface.
COPYRIGHT: (C)1978,JPO&Japio
JP15190376A 1976-12-20 1976-12-20 Forming method of insulation film Pending JPS5376747A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15190376A JPS5376747A (en) 1976-12-20 1976-12-20 Forming method of insulation film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15190376A JPS5376747A (en) 1976-12-20 1976-12-20 Forming method of insulation film

Publications (1)

Publication Number Publication Date
JPS5376747A true JPS5376747A (en) 1978-07-07

Family

ID=15528702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15190376A Pending JPS5376747A (en) 1976-12-20 1976-12-20 Forming method of insulation film

Country Status (1)

Country Link
JP (1) JPS5376747A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60100434A (en) * 1983-11-05 1985-06-04 Mitsubishi Electric Corp Insulating coated film treating device for semiconductor substrate
US5294257A (en) * 1991-10-28 1994-03-15 International Business Machines Corporation Edge masking spin tool
US6750739B2 (en) 2000-06-15 2004-06-15 Matsushita Electric Industrial Co., Ltd. Resonator and high-frequency filter

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60100434A (en) * 1983-11-05 1985-06-04 Mitsubishi Electric Corp Insulating coated film treating device for semiconductor substrate
US5294257A (en) * 1991-10-28 1994-03-15 International Business Machines Corporation Edge masking spin tool
US6750739B2 (en) 2000-06-15 2004-06-15 Matsushita Electric Industrial Co., Ltd. Resonator and high-frequency filter
US6933811B2 (en) 2000-06-15 2005-08-23 Matsushita Electric Industrial Co., Ltd. Resonator and high-frequency filter

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