JPS5378164A - Scanning electronic microscope and its equivalent unit - Google Patents

Scanning electronic microscope and its equivalent unit

Info

Publication number
JPS5378164A
JPS5378164A JP15453276A JP15453276A JPS5378164A JP S5378164 A JPS5378164 A JP S5378164A JP 15453276 A JP15453276 A JP 15453276A JP 15453276 A JP15453276 A JP 15453276A JP S5378164 A JPS5378164 A JP S5378164A
Authority
JP
Japan
Prior art keywords
electronic microscope
scanning electronic
equivalent unit
equivalent
simplify
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15453276A
Other languages
Japanese (ja)
Inventor
Shuichi Saito
Ryuzo Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP15453276A priority Critical patent/JPS5378164A/en
Publication of JPS5378164A publication Critical patent/JPS5378164A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To simplify the operation and to obtain the greatest resolution, by controlling the exciting current of the lens for opening angle control related to the acceleration voltage control of electron gun.
COPYRIGHT: (C)1978,JPO&Japio
JP15453276A 1976-12-22 1976-12-22 Scanning electronic microscope and its equivalent unit Pending JPS5378164A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15453276A JPS5378164A (en) 1976-12-22 1976-12-22 Scanning electronic microscope and its equivalent unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15453276A JPS5378164A (en) 1976-12-22 1976-12-22 Scanning electronic microscope and its equivalent unit

Publications (1)

Publication Number Publication Date
JPS5378164A true JPS5378164A (en) 1978-07-11

Family

ID=15586307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15453276A Pending JPS5378164A (en) 1976-12-22 1976-12-22 Scanning electronic microscope and its equivalent unit

Country Status (1)

Country Link
JP (1) JPS5378164A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51124371A (en) * 1975-04-23 1976-10-29 Jeol Ltd Scanning type electron microscope and similar equipment provided with means for controlling opening angle of electron beam for irradiating s amples

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51124371A (en) * 1975-04-23 1976-10-29 Jeol Ltd Scanning type electron microscope and similar equipment provided with means for controlling opening angle of electron beam for irradiating s amples

Similar Documents

Publication Publication Date Title
JPS5383525A (en) Action control mechanism of zoom lens
JPS5378164A (en) Scanning electronic microscope and its equivalent unit
JPS5322357A (en) Beam blanking unit
JPS5236024A (en) Actuating device for camera
JPS52107793A (en) Unit for obtaining x-ray objective axis shift image
JPS5228204A (en) Station selector unit
JPS51112121A (en) Keyboard
JPS51117568A (en) Electron gun for use in electron microscope
JPS5232525A (en) High voltage generator
JPS5362978A (en) Electron microscope
JPS5229169A (en) Image display device
JPS5355935A (en) Sample holding circuit
JPS53120277A (en) Electron beam exposure device
JPS5373715A (en) Sequential operation control device for refuse collecting vehicle
JPS51130817A (en) D.c. motor controlling device
JPS53126256A (en) Automatic brightness controller of scan-type electron microscope
JPS5399410A (en) Controller for thyristor motor
JPS51142277A (en) Device for electron-beam exposure
JPS5354465A (en) Lens control circuit for electromicroscope or the like
JPS54158854A (en) High-resolution pickup unit
JPS5270745A (en) Adjuster for sample position and inclination
JPS51118019A (en) Voltage regulator of generator
JPS51142959A (en) Electron microscope
JPS5439566A (en) Electronic microscope
JPS5376311A (en) Control device for motor