JPS5378171A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5378171A JPS5378171A JP15461576A JP15461576A JPS5378171A JP S5378171 A JPS5378171 A JP S5378171A JP 15461576 A JP15461576 A JP 15461576A JP 15461576 A JP15461576 A JP 15461576A JP S5378171 A JPS5378171 A JP S5378171A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- wave
- oxidization
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 238000000866 electrolytic etching Methods 0.000 abstract 1
- 238000009713 electroplating Methods 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To perform the uniform electroplating, anode-oxidization and electrolytic etching using a half-wave or full-wave rectification output.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15461576A JPS5378171A (en) | 1976-12-21 | 1976-12-21 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15461576A JPS5378171A (en) | 1976-12-21 | 1976-12-21 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5378171A true JPS5378171A (en) | 1978-07-11 |
Family
ID=15588048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15461576A Pending JPS5378171A (en) | 1976-12-21 | 1976-12-21 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5378171A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06204207A (en) * | 1991-03-14 | 1994-07-22 | General Motors Corp <Gm> | Method for selectively etching semiconductor material |
-
1976
- 1976-12-21 JP JP15461576A patent/JPS5378171A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06204207A (en) * | 1991-03-14 | 1994-07-22 | General Motors Corp <Gm> | Method for selectively etching semiconductor material |
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