JPS5380159A - Epitaxial growth device for molecular beam - Google Patents

Epitaxial growth device for molecular beam

Info

Publication number
JPS5380159A
JPS5380159A JP15677276A JP15677276A JPS5380159A JP S5380159 A JPS5380159 A JP S5380159A JP 15677276 A JP15677276 A JP 15677276A JP 15677276 A JP15677276 A JP 15677276A JP S5380159 A JPS5380159 A JP S5380159A
Authority
JP
Japan
Prior art keywords
molecular beam
epitaxial growth
growth device
exists
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15677276A
Other languages
Japanese (ja)
Inventor
Seihei Maekawa
Akio Yamaguchi
Tsuneo Furuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15677276A priority Critical patent/JPS5380159A/en
Publication of JPS5380159A publication Critical patent/JPS5380159A/en
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To improve the reliability and to decrease its cost by providing one sheet of shutter against one couple of exists at the time when a growth dvice is constituted by opening the molecular beam exists which correspond to several molecular beam sources respectively to a slit board and by providing the shutters to these exists.
COPYRIGHT: (C)1978,JPO&Japio
JP15677276A 1976-12-25 1976-12-25 Epitaxial growth device for molecular beam Pending JPS5380159A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15677276A JPS5380159A (en) 1976-12-25 1976-12-25 Epitaxial growth device for molecular beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15677276A JPS5380159A (en) 1976-12-25 1976-12-25 Epitaxial growth device for molecular beam

Publications (1)

Publication Number Publication Date
JPS5380159A true JPS5380159A (en) 1978-07-15

Family

ID=15634968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15677276A Pending JPS5380159A (en) 1976-12-25 1976-12-25 Epitaxial growth device for molecular beam

Country Status (1)

Country Link
JP (1) JPS5380159A (en)

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