JPS5380184A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5380184A
JPS5380184A JP15689676A JP15689676A JPS5380184A JP S5380184 A JPS5380184 A JP S5380184A JP 15689676 A JP15689676 A JP 15689676A JP 15689676 A JP15689676 A JP 15689676A JP S5380184 A JPS5380184 A JP S5380184A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
diffusion layer
substrate
securing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15689676A
Other languages
Japanese (ja)
Inventor
Masanori Fukumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15689676A priority Critical patent/JPS5380184A/en
Publication of JPS5380184A publication Critical patent/JPS5380184A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To reduce the contact resistance by securing a direct contact to the substrate via a metal film, and to prevent the short leak between the diffusion layer and the substrate by forming the electrode simply against the junction of the shallow diffusion layer.
COPYRIGHT: (C)1978,JPO&Japio
JP15689676A 1976-12-24 1976-12-24 Manufacture of semiconductor device Pending JPS5380184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15689676A JPS5380184A (en) 1976-12-24 1976-12-24 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15689676A JPS5380184A (en) 1976-12-24 1976-12-24 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5380184A true JPS5380184A (en) 1978-07-15

Family

ID=15637753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15689676A Pending JPS5380184A (en) 1976-12-24 1976-12-24 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5380184A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59219940A (en) * 1983-05-30 1984-12-11 Toshiba Corp Manufacture of semiconductor device
JPS60187041A (en) * 1984-03-06 1985-09-24 Seiko Epson Corp Semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59219940A (en) * 1983-05-30 1984-12-11 Toshiba Corp Manufacture of semiconductor device
JPS60187041A (en) * 1984-03-06 1985-09-24 Seiko Epson Corp Semiconductor device

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