JPS5380974A - Clean bench - Google Patents

Clean bench

Info

Publication number
JPS5380974A
JPS5380974A JP15649576A JP15649576A JPS5380974A JP S5380974 A JPS5380974 A JP S5380974A JP 15649576 A JP15649576 A JP 15649576A JP 15649576 A JP15649576 A JP 15649576A JP S5380974 A JPS5380974 A JP S5380974A
Authority
JP
Japan
Prior art keywords
clean bench
maintenance
control
deterioration
avoid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15649576A
Other languages
Japanese (ja)
Inventor
Susumu Nanko
Hiroshi Maejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15649576A priority Critical patent/JPS5380974A/en
Publication of JPS5380974A publication Critical patent/JPS5380974A/en
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)

Abstract

PURPOSE: To avoid the deterioration of the cleanness caused by the maintenance and control work, by carrying out the maintenance and control for the production machine within a clean bench through the back of the clean bench.
COPYRIGHT: (C)1978,JPO&Japio
JP15649576A 1976-12-27 1976-12-27 Clean bench Pending JPS5380974A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15649576A JPS5380974A (en) 1976-12-27 1976-12-27 Clean bench

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15649576A JPS5380974A (en) 1976-12-27 1976-12-27 Clean bench

Publications (1)

Publication Number Publication Date
JPS5380974A true JPS5380974A (en) 1978-07-17

Family

ID=15628991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15649576A Pending JPS5380974A (en) 1976-12-27 1976-12-27 Clean bench

Country Status (1)

Country Link
JP (1) JPS5380974A (en)

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