JPS5381176A - Measuring apparatus for degree of vacuum - Google Patents

Measuring apparatus for degree of vacuum

Info

Publication number
JPS5381176A
JPS5381176A JP15691976A JP15691976A JPS5381176A JP S5381176 A JPS5381176 A JP S5381176A JP 15691976 A JP15691976 A JP 15691976A JP 15691976 A JP15691976 A JP 15691976A JP S5381176 A JPS5381176 A JP S5381176A
Authority
JP
Japan
Prior art keywords
vacuum
degree
measuring apparatus
electric field
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15691976A
Other languages
Japanese (ja)
Other versions
JPS5919299B2 (en
Inventor
Osamu Sentoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15691976A priority Critical patent/JPS5919299B2/en
Publication of JPS5381176A publication Critical patent/JPS5381176A/en
Publication of JPS5919299B2 publication Critical patent/JPS5919299B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

PURPOSE: To perform non-destructive and contactless measurement of the degrees of vacuum with sufficient reliability by applying a strong electric field to the vacuum system to be measured and measuring the potential of the potential detecting conductor provided within this electric field.
COPYRIGHT: (C)1978,JPO&Japio
JP15691976A 1976-12-25 1976-12-25 Vacuum measuring device Expired JPS5919299B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15691976A JPS5919299B2 (en) 1976-12-25 1976-12-25 Vacuum measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15691976A JPS5919299B2 (en) 1976-12-25 1976-12-25 Vacuum measuring device

Publications (2)

Publication Number Publication Date
JPS5381176A true JPS5381176A (en) 1978-07-18
JPS5919299B2 JPS5919299B2 (en) 1984-05-04

Family

ID=15638232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15691976A Expired JPS5919299B2 (en) 1976-12-25 1976-12-25 Vacuum measuring device

Country Status (1)

Country Link
JP (1) JPS5919299B2 (en)

Also Published As

Publication number Publication date
JPS5919299B2 (en) 1984-05-04

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