JPS5384473A - Exposure method of electronic beam - Google Patents

Exposure method of electronic beam

Info

Publication number
JPS5384473A
JPS5384473A JP15947576A JP15947576A JPS5384473A JP S5384473 A JPS5384473 A JP S5384473A JP 15947576 A JP15947576 A JP 15947576A JP 15947576 A JP15947576 A JP 15947576A JP S5384473 A JPS5384473 A JP S5384473A
Authority
JP
Japan
Prior art keywords
electronic beam
exposure method
shorten
grown
avoid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15947576A
Other languages
Japanese (ja)
Other versions
JPS5846848B2 (en
Inventor
Masanao Itoga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP51159475A priority Critical patent/JPS5846848B2/en
Publication of JPS5384473A publication Critical patent/JPS5384473A/en
Publication of JPS5846848B2 publication Critical patent/JPS5846848B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To avoid the local exposure in a beard shape by providing the light source of the ultraviolet rays and shorten the radical time life which is grown by the electronic beam leaked from a desired place.
COPYRIGHT: (C)1978,JPO&Japio
JP51159475A 1976-12-29 1976-12-29 Electron beam exposure method Expired JPS5846848B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51159475A JPS5846848B2 (en) 1976-12-29 1976-12-29 Electron beam exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51159475A JPS5846848B2 (en) 1976-12-29 1976-12-29 Electron beam exposure method

Publications (2)

Publication Number Publication Date
JPS5384473A true JPS5384473A (en) 1978-07-25
JPS5846848B2 JPS5846848B2 (en) 1983-10-19

Family

ID=15694573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51159475A Expired JPS5846848B2 (en) 1976-12-29 1976-12-29 Electron beam exposure method

Country Status (1)

Country Link
JP (1) JPS5846848B2 (en)

Also Published As

Publication number Publication date
JPS5846848B2 (en) 1983-10-19

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