JPS5384716A - Correction mask - Google Patents

Correction mask

Info

Publication number
JPS5384716A
JPS5384716A JP16064276A JP16064276A JPS5384716A JP S5384716 A JPS5384716 A JP S5384716A JP 16064276 A JP16064276 A JP 16064276A JP 16064276 A JP16064276 A JP 16064276A JP S5384716 A JPS5384716 A JP S5384716A
Authority
JP
Japan
Prior art keywords
correction mask
multiplication
reference scale
mask
looking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16064276A
Other languages
Japanese (ja)
Inventor
Takao Furukawa
Takeshi Yoshizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16064276A priority Critical patent/JPS5384716A/en
Publication of JPS5384716A publication Critical patent/JPS5384716A/en
Pending legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To correct the mask multiplication by looking at with an eye in a simple and precise manner by comparing the multiplication image of a reference scale of an original drawing with the reference scale of multiplication.
COPYRIGHT: (C)1978,JPO&Japio
JP16064276A 1976-12-29 1976-12-29 Correction mask Pending JPS5384716A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16064276A JPS5384716A (en) 1976-12-29 1976-12-29 Correction mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16064276A JPS5384716A (en) 1976-12-29 1976-12-29 Correction mask

Publications (1)

Publication Number Publication Date
JPS5384716A true JPS5384716A (en) 1978-07-26

Family

ID=15719338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16064276A Pending JPS5384716A (en) 1976-12-29 1976-12-29 Correction mask

Country Status (1)

Country Link
JP (1) JPS5384716A (en)

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