JPS5385375A - Pattern inspecting device - Google Patents

Pattern inspecting device

Info

Publication number
JPS5385375A
JPS5385375A JP15805376A JP15805376A JPS5385375A JP S5385375 A JPS5385375 A JP S5385375A JP 15805376 A JP15805376 A JP 15805376A JP 15805376 A JP15805376 A JP 15805376A JP S5385375 A JPS5385375 A JP S5385375A
Authority
JP
Japan
Prior art keywords
inspecting device
pattern inspecting
pattern
inspecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15805376A
Other languages
Japanese (ja)
Inventor
Masahito Nakashima
Katsumi Fujiwara
Yoshiaki Gotou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15805376A priority Critical patent/JPS5385375A/en
Publication of JPS5385375A publication Critical patent/JPS5385375A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP15805376A 1976-12-31 1976-12-31 Pattern inspecting device Pending JPS5385375A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15805376A JPS5385375A (en) 1976-12-31 1976-12-31 Pattern inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15805376A JPS5385375A (en) 1976-12-31 1976-12-31 Pattern inspecting device

Publications (1)

Publication Number Publication Date
JPS5385375A true JPS5385375A (en) 1978-07-27

Family

ID=15663252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15805376A Pending JPS5385375A (en) 1976-12-31 1976-12-31 Pattern inspecting device

Country Status (1)

Country Link
JP (1) JPS5385375A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57128834A (en) * 1981-02-04 1982-08-10 Nippon Kogaku Kk <Nikon> Inspecting apparatus of foreign substance
JPS57161640A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for surface

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57128834A (en) * 1981-02-04 1982-08-10 Nippon Kogaku Kk <Nikon> Inspecting apparatus of foreign substance
JPS57161640A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for surface

Similar Documents

Publication Publication Date Title
ZA771734B (en) Position testing device
JPS5319737A (en) Tester
JPS5369689A (en) Inspection apparatus
JPS52113468A (en) Device for inspecting
JPS52137375A (en) Measuring apparatus
JPS52146682A (en) Surface inspecting apparatus
JPS5382496A (en) Measuring apparatus
JPS52113767A (en) Measuring device
JPS5348787A (en) Testing device
JPS5383657A (en) Measuring apparatus
JPS53143974A (en) Inspecting device
JPS5384169A (en) Pattern inspecting device
JPS5337094A (en) Electroochemical measuring apparatus
JPS539984A (en) Inspecting apparatus
JPS5296358A (en) Device for inspecting pattern
JPS52131753A (en) Measuring device
JPS52114242A (en) Pattern analyzer
JPS5385374A (en) Pattern inspecting device
JPS52133241A (en) Shape detecting apparatus
JPS5384167A (en) Pattern inspecting device
JPS5384166A (en) Pattern inspecting device
JPS53139993A (en) Xxray inspecting device
JPS5326157A (en) Stereophotographic measuring apparatus
JPS5368159A (en) Measuring device
JPS5242962A (en) Device for analyzing pattern