JPS5388580A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5388580A
JPS5388580A JP340877A JP340877A JPS5388580A JP S5388580 A JPS5388580 A JP S5388580A JP 340877 A JP340877 A JP 340877A JP 340877 A JP340877 A JP 340877A JP S5388580 A JPS5388580 A JP S5388580A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
emitter
injection
lateral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP340877A
Other languages
Japanese (ja)
Inventor
Kenichiro Ryono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP340877A priority Critical patent/JPS5388580A/en
Publication of JPS5388580A publication Critical patent/JPS5388580A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)

Abstract

PURPOSE: To enhance the injection efficiency in the emitter lateral direction of lateral transistors, suppress the injection in the vertical direction and improve hFE and fT characteristics by forming a base region from the surface of an epitaxial layer in such a way that the impurity concentration distribution in the emitter region bottom becomes peaks.
COPYRIGHT: (C)1978,JPO&Japio
JP340877A 1977-01-13 1977-01-13 Production of semiconductor device Pending JPS5388580A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP340877A JPS5388580A (en) 1977-01-13 1977-01-13 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP340877A JPS5388580A (en) 1977-01-13 1977-01-13 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5388580A true JPS5388580A (en) 1978-08-04

Family

ID=11556545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP340877A Pending JPS5388580A (en) 1977-01-13 1977-01-13 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5388580A (en)

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