JPS5389670A - Wafer target for mask position alignment - Google Patents

Wafer target for mask position alignment

Info

Publication number
JPS5389670A
JPS5389670A JP395077A JP395077A JPS5389670A JP S5389670 A JPS5389670 A JP S5389670A JP 395077 A JP395077 A JP 395077A JP 395077 A JP395077 A JP 395077A JP S5389670 A JPS5389670 A JP S5389670A
Authority
JP
Japan
Prior art keywords
position alignment
mask position
wafer target
target
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP395077A
Other languages
Japanese (ja)
Inventor
Seiichi Takei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP395077A priority Critical patent/JPS5389670A/en
Publication of JPS5389670A publication Critical patent/JPS5389670A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To make a novel wafer target which makes possible the common use of both of a scanning system and a light quantity difference system.
COPYRIGHT: (C)1978,JPO&Japio
JP395077A 1977-01-19 1977-01-19 Wafer target for mask position alignment Pending JPS5389670A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP395077A JPS5389670A (en) 1977-01-19 1977-01-19 Wafer target for mask position alignment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP395077A JPS5389670A (en) 1977-01-19 1977-01-19 Wafer target for mask position alignment

Publications (1)

Publication Number Publication Date
JPS5389670A true JPS5389670A (en) 1978-08-07

Family

ID=11571383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP395077A Pending JPS5389670A (en) 1977-01-19 1977-01-19 Wafer target for mask position alignment

Country Status (1)

Country Link
JP (1) JPS5389670A (en)

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