JPS5393773A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5393773A
JPS5393773A JP801677A JP801677A JPS5393773A JP S5393773 A JPS5393773 A JP S5393773A JP 801677 A JP801677 A JP 801677A JP 801677 A JP801677 A JP 801677A JP S5393773 A JPS5393773 A JP S5393773A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
arsenic
impurity sources
sebstrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP801677A
Other languages
Japanese (ja)
Other versions
JPS5722412B2 (en
Inventor
Mikio Takagi
Kazufumi Nakayama
Haruo Shimoda
Saburo Ishiguro
Ichiro Sudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Furukawa Mining Co Ltd
Furukawa Kogyo Co Ltd
Original Assignee
Fujitsu Ltd
Furukawa Mining Co Ltd
Furukawa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Furukawa Mining Co Ltd, Furukawa Kogyo Co Ltd filed Critical Fujitsu Ltd
Priority to JP801677A priority Critical patent/JPS5393773A/en
Publication of JPS5393773A publication Critical patent/JPS5393773A/en
Publication of JPS5722412B2 publication Critical patent/JPS5722412B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To facilitate handing of arsenic impurity sources and the disposal after use by sealing substrates and the plate form impurity sources of the same shape formed with germanium arsenide crystal layer on surfaces within a closed tube and diffusing arsenic into the sebstrates through heating.
COPYRIGHT: (C)1978,JPO&Japio
JP801677A 1977-01-27 1977-01-27 Production of semiconductor device Granted JPS5393773A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP801677A JPS5393773A (en) 1977-01-27 1977-01-27 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP801677A JPS5393773A (en) 1977-01-27 1977-01-27 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5393773A true JPS5393773A (en) 1978-08-17
JPS5722412B2 JPS5722412B2 (en) 1982-05-13

Family

ID=11681538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP801677A Granted JPS5393773A (en) 1977-01-27 1977-01-27 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5393773A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5684344U (en) * 1979-11-29 1981-07-07
JP2009056435A (en) * 2007-09-03 2009-03-19 Kurita Water Ind Ltd Sedimentation tank

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5684344U (en) * 1979-11-29 1981-07-07
JP2009056435A (en) * 2007-09-03 2009-03-19 Kurita Water Ind Ltd Sedimentation tank

Also Published As

Publication number Publication date
JPS5722412B2 (en) 1982-05-13

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