JPS54103285U - - Google Patents

Info

Publication number: JPS54103285U
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP17635477U

Other languages

Japanese (ja)

Other versions

JPS587974Y2 (en

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-12-29

Filing date

1977-12-29

Publication date

1979-07-20

1977-12-29 Application filed filed Critical

1977-12-29 Priority to JP17635477U priority Critical patent/JPS587974Y2/en

1979-07-20 Publication of JPS54103285U publication Critical patent/JPS54103285U/ja

1983-02-12 Application granted granted Critical

1983-02-12 Publication of JPS587974Y2 publication Critical patent/JPS587974Y2/en

Status Expired legal-status Critical Current

Links

Landscapes

Electron Sources, Ion Sources (AREA)
Electron Tubes For Measurement (AREA)

JP17635477U 1977-12-29 1977-12-29 ion source Expired JPS587974Y2 (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP17635477U JPS587974Y2 (en)	1977-12-29	1977-12-29	ion source

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP17635477U JPS587974Y2 (en)	1977-12-29	1977-12-29	ion source

Publications (2)

Publication Number	Publication Date
JPS54103285U true JPS54103285U (en)	1979-07-20
JPS587974Y2 JPS587974Y2 (en)	1983-02-12

Family

ID=29184803

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP17635477U Expired JPS587974Y2 (en)	1977-12-29	1977-12-29	ion source

Country Status (1)

Country	Link
JP (1)	JPS587974Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS63108654A (en) *	1986-10-24	1988-05-13	Hitachi Ltd	Ion source
JPH03219540A (en) *	1989-11-14	1991-09-26	Tokyo Electron Ltd	ion source

1977
- 1977-12-29 JP JP17635477U patent/JPS587974Y2/en not_active Expired

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS63108654A (en) *	1986-10-24	1988-05-13	Hitachi Ltd	Ion source
JPH03219540A (en) *	1989-11-14	1991-09-26	Tokyo Electron Ltd	ion source

Also Published As

Publication number	Publication date
JPS587974Y2 (en)	1983-02-12

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