JPS54128681A - Semiconductor substrate supporting stand for vision exposure device - Google Patents

Semiconductor substrate supporting stand for vision exposure device

Info

Publication number
JPS54128681A
JPS54128681A JP3722978A JP3722978A JPS54128681A JP S54128681 A JPS54128681 A JP S54128681A JP 3722978 A JP3722978 A JP 3722978A JP 3722978 A JP3722978 A JP 3722978A JP S54128681 A JPS54128681 A JP S54128681A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
exposure device
substrate supporting
supporting stand
vision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3722978A
Other languages
Japanese (ja)
Inventor
Tooru Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP3722978A priority Critical patent/JPS54128681A/en
Publication of JPS54128681A publication Critical patent/JPS54128681A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP3722978A 1978-03-29 1978-03-29 Semiconductor substrate supporting stand for vision exposure device Pending JPS54128681A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3722978A JPS54128681A (en) 1978-03-29 1978-03-29 Semiconductor substrate supporting stand for vision exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3722978A JPS54128681A (en) 1978-03-29 1978-03-29 Semiconductor substrate supporting stand for vision exposure device

Publications (1)

Publication Number Publication Date
JPS54128681A true JPS54128681A (en) 1979-10-05

Family

ID=12491764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3722978A Pending JPS54128681A (en) 1978-03-29 1978-03-29 Semiconductor substrate supporting stand for vision exposure device

Country Status (1)

Country Link
JP (1) JPS54128681A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011385A (en) * 1973-05-30 1975-02-05
JPS5216171A (en) * 1975-07-30 1977-02-07 Hitachi Ltd Mask fitting device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011385A (en) * 1973-05-30 1975-02-05
JPS5216171A (en) * 1975-07-30 1977-02-07 Hitachi Ltd Mask fitting device

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