JPS5413755B2 - - Google Patents
Info
- Publication number
- JPS5413755B2 JPS5413755B2 JP7062777A JP7062777A JPS5413755B2 JP S5413755 B2 JPS5413755 B2 JP S5413755B2 JP 7062777 A JP7062777 A JP 7062777A JP 7062777 A JP7062777 A JP 7062777A JP S5413755 B2 JPS5413755 B2 JP S5413755B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7062777A JPS545663A (en) | 1977-06-15 | 1977-06-15 | Device for exposing electron beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7062777A JPS545663A (en) | 1977-06-15 | 1977-06-15 | Device for exposing electron beam |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS545663A JPS545663A (en) | 1979-01-17 |
| JPS5413755B2 true JPS5413755B2 (ja) | 1979-06-01 |
Family
ID=13437044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7062777A Granted JPS545663A (en) | 1977-06-15 | 1977-06-15 | Device for exposing electron beam |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS545663A (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5610926A (en) * | 1979-07-06 | 1981-02-03 | Hitachi Ltd | Electron beam drawing device |
-
1977
- 1977-06-15 JP JP7062777A patent/JPS545663A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS545663A (en) | 1979-01-17 |