JPS5415748B2 - - Google Patents

Info

Publication number
JPS5415748B2
JPS5415748B2 JP5982875A JP5982875A JPS5415748B2 JP S5415748 B2 JPS5415748 B2 JP S5415748B2 JP 5982875 A JP5982875 A JP 5982875A JP 5982875 A JP5982875 A JP 5982875A JP S5415748 B2 JPS5415748 B2 JP S5415748B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5982875A
Other languages
Japanese (ja)
Other versions
JPS51135362A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50059828A priority Critical patent/JPS51135362A/en
Publication of JPS51135362A publication Critical patent/JPS51135362A/en
Publication of JPS5415748B2 publication Critical patent/JPS5415748B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
JP50059828A 1975-05-19 1975-05-19 Method of manufacturing silicon semiconductor element Granted JPS51135362A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50059828A JPS51135362A (en) 1975-05-19 1975-05-19 Method of manufacturing silicon semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50059828A JPS51135362A (en) 1975-05-19 1975-05-19 Method of manufacturing silicon semiconductor element

Publications (2)

Publication Number Publication Date
JPS51135362A JPS51135362A (en) 1976-11-24
JPS5415748B2 true JPS5415748B2 (en) 1979-06-16

Family

ID=13124465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50059828A Granted JPS51135362A (en) 1975-05-19 1975-05-19 Method of manufacturing silicon semiconductor element

Country Status (1)

Country Link
JP (1) JPS51135362A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147829A (en) * 1987-12-04 1989-06-09 Toshiba Corp Manufacture of semiconductor device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS553828B2 (en) * 1972-11-30 1980-01-26

Also Published As

Publication number Publication date
JPS51135362A (en) 1976-11-24

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