JPS5417764A - Plane shape measuring system - Google Patents

Plane shape measuring system

Info

Publication number
JPS5417764A
JPS5417764A JP8166277A JP8166277A JPS5417764A JP S5417764 A JPS5417764 A JP S5417764A JP 8166277 A JP8166277 A JP 8166277A JP 8166277 A JP8166277 A JP 8166277A JP S5417764 A JPS5417764 A JP S5417764A
Authority
JP
Japan
Prior art keywords
measuring system
shape measuring
plane shape
mearure
parallelism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8166277A
Other languages
Japanese (ja)
Other versions
JPS5823565B2 (en
Inventor
Fumikazu Ohira
Atsunobu Une
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP52081662A priority Critical patent/JPS5823565B2/en
Publication of JPS5417764A publication Critical patent/JPS5417764A/en
Publication of JPS5823565B2 publication Critical patent/JPS5823565B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

PURPOSE: To automatically mearure the flatness and parallelism of samples within a short time with high accuracy by performing scanning of interference fringes with a television camera and operating an optical flat tilting device by the command of an electronic computer.
COPYRIGHT: (C)1979,JPO&Japio
JP52081662A 1977-07-08 1977-07-08 Planar shape measurement method Expired JPS5823565B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52081662A JPS5823565B2 (en) 1977-07-08 1977-07-08 Planar shape measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52081662A JPS5823565B2 (en) 1977-07-08 1977-07-08 Planar shape measurement method

Publications (2)

Publication Number Publication Date
JPS5417764A true JPS5417764A (en) 1979-02-09
JPS5823565B2 JPS5823565B2 (en) 1983-05-16

Family

ID=13752530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52081662A Expired JPS5823565B2 (en) 1977-07-08 1977-07-08 Planar shape measurement method

Country Status (1)

Country Link
JP (1) JPS5823565B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57120805A (en) * 1981-01-20 1982-07-28 Hitachi Metals Ltd Inspecting method of surface defect
JPS5985906U (en) * 1982-12-01 1984-06-11 富士写真光機株式会社 Flatness measuring device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60129264U (en) * 1984-02-09 1985-08-30 エステ−化学株式会社 Dehumidifier for shoes

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5039164A (en) * 1973-08-10 1975-04-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5039164A (en) * 1973-08-10 1975-04-11

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57120805A (en) * 1981-01-20 1982-07-28 Hitachi Metals Ltd Inspecting method of surface defect
JPS5985906U (en) * 1982-12-01 1984-06-11 富士写真光機株式会社 Flatness measuring device

Also Published As

Publication number Publication date
JPS5823565B2 (en) 1983-05-16

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