JPS541900A - Zinc oxide base ceramic for high frequecy sputtering - Google Patents

Zinc oxide base ceramic for high frequecy sputtering

Info

Publication number
JPS541900A
JPS541900A JP6769777A JP6769777A JPS541900A JP S541900 A JPS541900 A JP S541900A JP 6769777 A JP6769777 A JP 6769777A JP 6769777 A JP6769777 A JP 6769777A JP S541900 A JPS541900 A JP S541900A
Authority
JP
Japan
Prior art keywords
sputtering
zinc oxide
oxide base
base ceramic
frequecy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6769777A
Other languages
Japanese (ja)
Other versions
JPS605236B2 (en
Inventor
Toshio Ogawa
Kouji Nishiyama
Tasuku Masuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP52067697A priority Critical patent/JPS605236B2/en
Publication of JPS541900A publication Critical patent/JPS541900A/en
Publication of JPS605236B2 publication Critical patent/JPS605236B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Physical Vapour Deposition (AREA)
JP52067697A 1977-06-07 1977-06-07 Zinc oxide porcelain for high frequency sputtering Expired JPS605236B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52067697A JPS605236B2 (en) 1977-06-07 1977-06-07 Zinc oxide porcelain for high frequency sputtering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52067697A JPS605236B2 (en) 1977-06-07 1977-06-07 Zinc oxide porcelain for high frequency sputtering

Publications (2)

Publication Number Publication Date
JPS541900A true JPS541900A (en) 1979-01-09
JPS605236B2 JPS605236B2 (en) 1985-02-08

Family

ID=13352396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52067697A Expired JPS605236B2 (en) 1977-06-07 1977-06-07 Zinc oxide porcelain for high frequency sputtering

Country Status (1)

Country Link
JP (1) JPS605236B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01123066A (en) * 1987-11-06 1989-05-16 Nippon Kentetsu Co Ltd Sputtering method
JP2014009384A (en) * 2012-06-29 2014-01-20 Fujifilm Corp Wurtzite type composite oxide and piezoelectric element including the same
WO2015029272A1 (en) * 2013-08-26 2015-03-05 Jx日鉱日石金属株式会社 Sintered body and amorphous film

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01123066A (en) * 1987-11-06 1989-05-16 Nippon Kentetsu Co Ltd Sputtering method
JP2014009384A (en) * 2012-06-29 2014-01-20 Fujifilm Corp Wurtzite type composite oxide and piezoelectric element including the same
WO2015029272A1 (en) * 2013-08-26 2015-03-05 Jx日鉱日石金属株式会社 Sintered body and amorphous film
JP5690982B1 (en) * 2013-08-26 2015-03-25 Jx日鉱日石金属株式会社 Sintered body and amorphous film

Also Published As

Publication number Publication date
JPS605236B2 (en) 1985-02-08

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