JPS542059A - Semiconductor wafer - Google Patents

Semiconductor wafer

Info

Publication number
JPS542059A
JPS542059A JP6750277A JP6750277A JPS542059A JP S542059 A JPS542059 A JP S542059A JP 6750277 A JP6750277 A JP 6750277A JP 6750277 A JP6750277 A JP 6750277A JP S542059 A JPS542059 A JP S542059A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
marks
symbol
giving
ensure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6750277A
Other languages
Japanese (ja)
Inventor
Masakazu Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6750277A priority Critical patent/JPS542059A/en
Priority to GB23975/78A priority patent/GB1584343A/en
Priority to DE2823869A priority patent/DE2823869C2/en
Priority to US05/911,234 priority patent/US4166574A/en
Publication of JPS542059A publication Critical patent/JPS542059A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To ensure the automatic read in of marks, by giving a symbol representing that the marks are close to the symbol near the mark describing region on the wafer surface.
COPYRIGHT: (C)1979,JPO&Japio
JP6750277A 1977-06-07 1977-06-07 Semiconductor wafer Pending JPS542059A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP6750277A JPS542059A (en) 1977-06-07 1977-06-07 Semiconductor wafer
GB23975/78A GB1584343A (en) 1977-06-07 1978-05-30 Apparatus for marking identification symbols on wafer
DE2823869A DE2823869C2 (en) 1977-06-07 1978-05-31 Identification symbol scribing device
US05/911,234 US4166574A (en) 1977-06-07 1978-05-31 Apparatus for marking identification symbols on wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6750277A JPS542059A (en) 1977-06-07 1977-06-07 Semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS542059A true JPS542059A (en) 1979-01-09

Family

ID=13346818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6750277A Pending JPS542059A (en) 1977-06-07 1977-06-07 Semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS542059A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142753U (en) * 1980-03-28 1981-10-28
JPS56138925A (en) * 1980-03-31 1981-10-29 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142753U (en) * 1980-03-28 1981-10-28
JPS56138925A (en) * 1980-03-31 1981-10-29 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device

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