JPS5422873B2 - - Google Patents
Info
- Publication number
- JPS5422873B2 JPS5422873B2 JP3679575A JP3679575A JPS5422873B2 JP S5422873 B2 JPS5422873 B2 JP S5422873B2 JP 3679575 A JP3679575 A JP 3679575A JP 3679575 A JP3679575 A JP 3679575A JP S5422873 B2 JPS5422873 B2 JP S5422873B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3679575A JPS51112263A (en) | 1975-03-28 | 1975-03-28 | Semiconductor surface processor base |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3679575A JPS51112263A (en) | 1975-03-28 | 1975-03-28 | Semiconductor surface processor base |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51112263A JPS51112263A (en) | 1976-10-04 |
| JPS5422873B2 true JPS5422873B2 (ja) | 1979-08-09 |
Family
ID=12479710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3679575A Granted JPS51112263A (en) | 1975-03-28 | 1975-03-28 | Semiconductor surface processor base |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51112263A (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6157946A (ja) * | 1984-08-29 | 1986-03-25 | Sharp Corp | アモルフアスシリコン感光体製造用装置 |
| JPS6177056A (ja) * | 1984-09-21 | 1986-04-19 | Sharp Corp | アモルフアスシリコン感光体製造用装置 |
| JPS6285423A (ja) * | 1985-10-11 | 1987-04-18 | Toshiba Corp | 有機金属熱分解気相結晶成長装置 |
| JPH02149769U (ja) * | 1989-05-18 | 1990-12-21 | ||
| DE102018126862A1 (de) * | 2018-10-26 | 2020-04-30 | Oerlikon Surface Solutions Ag, Pfäffikon | Werkstückträgereinrichtung und Beschichtungsanordnung |
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1975
- 1975-03-28 JP JP3679575A patent/JPS51112263A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51112263A (en) | 1976-10-04 |