JPS5428643A - Vibrationproof optical system - Google Patents

Vibrationproof optical system

Info

Publication number
JPS5428643A
JPS5428643A JP9435877A JP9435877A JPS5428643A JP S5428643 A JPS5428643 A JP S5428643A JP 9435877 A JP9435877 A JP 9435877A JP 9435877 A JP9435877 A JP 9435877A JP S5428643 A JPS5428643 A JP S5428643A
Authority
JP
Japan
Prior art keywords
vibrationproof
optical system
eliminate
preprecision
vibrationproofing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9435877A
Other languages
Japanese (ja)
Inventor
Ryuichi Higuchi
Kazunari Tomijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9435877A priority Critical patent/JPS5428643A/en
Publication of JPS5428643A publication Critical patent/JPS5428643A/en
Pending legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE: To eliminate the effect of vibrations and eliminate the need for ordinary or preprecision vibrationproofing base by controlling the polarizing element or electrooptic element in optical path with the output signal of a sensor which measures the intervals and positions of interference fringes.
COPYRIGHT: (C)1979,JPO&Japio
JP9435877A 1977-08-05 1977-08-05 Vibrationproof optical system Pending JPS5428643A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9435877A JPS5428643A (en) 1977-08-05 1977-08-05 Vibrationproof optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9435877A JPS5428643A (en) 1977-08-05 1977-08-05 Vibrationproof optical system

Publications (1)

Publication Number Publication Date
JPS5428643A true JPS5428643A (en) 1979-03-03

Family

ID=14108062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9435877A Pending JPS5428643A (en) 1977-08-05 1977-08-05 Vibrationproof optical system

Country Status (1)

Country Link
JP (1) JPS5428643A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53145662A (en) * 1977-05-25 1978-12-19 Mitsubishi Electric Corp Vibration-proof device for interference fringe generating system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53145662A (en) * 1977-05-25 1978-12-19 Mitsubishi Electric Corp Vibration-proof device for interference fringe generating system

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